Silicon surface microstructures created by 1064 nm Nd:YAG nanosecond laser

Wuli Xuebao/Acta Physica Sinica

Volumn 60, Issue 2, 2011, Pages

  Yang, Hong Dao ^a   Li, Xiao Hong ^a   Li, Guo Qiang ^a   Yuan, Chun Hua ^a   Tang, Duo Chang ^a   Xu, Qin ^a   Qiu, Rong ^a   Wang, Jun Bo ^a  

^a SOUTHWEST UNIVERSITY OF SCIENCE AND TECHNOLOGY   (China)

Author keywords

Microstructure of silicon; Nanosecond laser; Phase explosion; Thermal stress

Indexed keywords

EID: 79952518813     PISSN: 10003290     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

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