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Volumn 18, Issue 10, 2009, Pages 4292-4297
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Experimental study on microdeposition of the copper thin film by femtosecond laser-induced forward transfer
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Author keywords
Ablation; Deposition; Femtosecond laser; Laser induced forward transfer; Thin film
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Indexed keywords
COPPER FILMS;
COPPER THIN FILM;
CRYSTAL FORMS;
DONOR SUBSTRATES;
EXPERIMENTAL STUDIES;
FEMTOSECOND LASER;
LASER FLUENCES;
LASER-INDUCED FORWARD TRANSFER;
MICRODEPOSITION;
PULSE FLUENCE;
QUARTZ SUBSTRATE;
THRESHOLD FLUENCES;
X-RAY DIFFRACTION MEASUREMENTS;
ABLATION;
COPPER;
COPPER PLATING;
DEPOSITION;
LASERS;
MASS TRANSFER;
METALLIC FILMS;
OXIDE MINERALS;
QUARTZ;
THIN FILM DEVICES;
THIN FILMS;
ULTRASHORT PULSES;
PULSED LASER APPLICATIONS;
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EID: 70350465113
PISSN: 16741056
EISSN: None
Source Type: Journal
DOI: 10.1088/1674-1056/18/10/033 Document Type: Article |
Times cited : (5)
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References (16)
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