Spectral and temporal behavior of an alkali metal plasma extreme ultraviolet source for surface morphology applications

Applied Physics Letters

Volumn 98, Issue 9, 2011, Pages

  Higashiguchi, Takeshi ^a,b   Yamaguchi, Mami ^a   Otsuka, Takamitsu ^a   Terauchi, Hiromitsu ^a   Yugami, Noboru ^a,b   Yatagai, Toyohiko ^a   D'Arcy, Rebekah ^c   Dunne, Padraig ^c   O'Sullivan, Gerry ^c  

^a UTSUNOMIYA UNIVERSITY   (Japan)

^b JAPAN SCIENCE AND TECHNOLOGY AGENCY   (Japan)

^c UNIVERSITY COLLEGE DUBLIN   (Ireland)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC PROCESS; BROADBAND EMISSION; EMISSION SPECTRUMS; EXTREME ULTRAVIOLET SOURCES; HYDRODYNAMIC SIMULATION; TEMPORAL BEHAVIOR; TIME-AVERAGED;

EMISSION SPECTROSCOPY; LASER PRODUCED PLASMAS;

ULTRAVIOLET DEVICES;

EID: 79952423661     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3560304     Document Type: Article

References (19)

1. T. Ohtsubo, T. Azuma, M. Takaura, T. Higashiguchi, S. Kubodera, and W. Sasaki, Appl. Phys. A: Mater. Sci. Process. 0947-8396 76, 139 (2003). 10.1007/s00339-002-1458-9 (Pubitemid 35459435)
2. Y. Maezono, K. Toshikawa, K. Kurosawa, K. Amari, S. Ishimura, M. Katto, and A. Yokotani, Jpn. J. Appl. Phys., Part 1 0021-4922 46, 3534 (2007). 10.1143/JJAP.46.3534 (Pubitemid 47245483)
3. G. Tallents, E. Wagenaars, and G. Pert, Nat. Photonics 1749-4885 4, 809 (2010). 10.1038/nphoton.2010.277
4. H. Tanaka, A. Matsumoto, K. Akinaga, A. Takahashi, and T. Okada, Appl. Phys. Lett. 0003-6951 87, 041503 (2005). 10.1063/1.1989441 (Pubitemid 41117949)
5. Y. Ueno, G. Soumagne, A. Sumitani, A. Endo, and T. Higashiguchi, Appl. Phys. Lett. 0003-6951 91, 231501 (2007). 10.1063/1.2820451 (Pubitemid 350234421)
6. T. Otsuka, D. Kilbane, J. White, T. Higashiguchi, N. Yugami, T. Yatagai, W. Jiang, A. Endo, P. Dunne, and G. O'Sullivan, Appl. Phys. Lett. 0003-6951 97, 111503 (2010). 10.1063/1.3490704
7. T. Otsuka, D. Kilbane, T. Higashiguchi, N. Yugami, T. Yatagai, W. Jiang, A. Endo, P. Dunne, and G. O'Sullivan, Appl. Phys. Lett. 0003-6951 97, 231503 (2010). 10.1063/1.3526383
8. N. Hirashita, M. Kinoshita, I. Aikawa, and T. Ajioka, Appl. Phys. Lett. 0003-6951 56, 451 (1990). 10.1063/1.102762
9. M. Wasamoto, M. Katto, M. Kaku, S. Kubodera, and A. Yokotani, Appl. Surf. Sci. 0169-4332 255, 9861 (2009). 10.1016/j.apsusc.2009.04.107
10. T. Higashiguchi, H. Terauchi, N. Yugami, T. Yatagai, W. Sasaki, R. D'Arcy, P. Dunne, and G. O'Sullivan, Appl. Phys. Lett. 0003-6951 96, 131505 (2010). 10.1063/1.3368705
11. D. Colombant and G. F. Tonon, J. Appl. Phys. 0021-8979 44, 3524 (1973). 10.1063/1.1662796
12. T. Fujimoto, J. Phys. Soc. Jpn. 0031-9015 47, 265 (1979) 10.1143/JPSJ.47.265
13. T. Fujimoto, J. Phys. Soc. Jpn. 0031-9015 47, 273 (1979). 10.1143/JPSJ.47.273
14. H. Griem, Principle of Plasma Spectroscopy, Cambridge Monographs on Plasma Physics (Cambridge University Press, Cambridge, 2005).
15. R. D. Cowan, The Theory of Atomic Structure and Spectra (University of California Press, Berkeley, 1981).
16. R. C. Spitzer, T. J. Orzechowski, D. W. Phillion, R. L. Kauffman, and C. Cerjan, J. Appl. Phys. 0021-8979 79, 2251 (1996). 10.1063/1.361149
17. M. Yamaura, S. Uchida, A. Sunahara, Y. Shimada, H. Nishimura, S. Fujioka, T. Okuno, K. Hashimoto, K. Nagai, T. Norimatsu, K. Nishihara, N. Miyanaga, Y. Izawa, and C. Yamanaka, Appl. Phys. Lett. 0003-6951 86, 181107 (2005). 10.1063/1.1915507 (Pubitemid 40861174)
18. S. Miyamoto, A. Shimoura, S. Amano, K. Fukugaki, H. Kinugasa, T. Inoue, and T. Mochizuki, Appl. Phys. Lett. 0003-6951 86, 261502 (2005). 10.1063/1.1968415 (Pubitemid 40983187)
19. J. White, P. Dunne, P. Hayden, F. O'Reilly, and G. O'Sullivan, Appl. Phys. Lett. 0003-6951 90, 181502 (2007). 10.1063/1.2735944 (Pubitemid 46701129)