Diagnosis of a low pressure capacitively coupled argon plasma by using a simple collisional-radiative model

Chinese Physics B

Volumn 20, Issue 1, 2011, Pages

  Yu, Yi Qing ^a   Xin, Yu ^a   Ning, Zhao Yuan ^a  

^a SOOCHOW UNIVERSITY   (China)

Author keywords

capacitively coupled plasma; collisional radiative model; Langmuir probe; optical emission spectroscopy

Indexed keywords

ARGON PLASMAS; CAPACITIVELY COUPLED; CAPACITIVELY COUPLED DISCHARGES; CAPACITIVELY COUPLED PLASMAS; COLLISIONAL-RADIATIVE MODEL; CURRENT MODELS; DIFFUSION LOSS; ELECTRON DENSITY AND TEMPERATURE MEASUREMENTS; ELECTRON-IMPACT EXCITATION; EMISSION LINES; LANGMUIR PROBE MEASUREMENTS; LOW PRESSURES; META-STABLE STATE; OPTICAL EMISSIONS; RADIATIVE STATE; RADIO FREQUENCIES; SPONTANEOUS RADIATIVE DECAY;

ELECTRIC DISCHARGES; EMISSION SPECTROSCOPY; IMPACT IONIZATION; INDUCTIVELY COUPLED PLASMA; LANGMUIR PROBES; LIGHT EMISSION; OPTICAL EMISSION SPECTROSCOPY; PROBES; RADIO; RADIO WAVES; TEMPERATURE MEASUREMENT;

COLLISIONAL PLASMAS;

EID: 79952365584     PISSN: 16741056     EISSN: None     Source Type: Journal    
DOI: 10.1088/1674-1056/20/1/015207     Document Type: Article

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