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Applied Physics Letters

Volumn 94, Issue 2, 2009, Pages

Electron energy distribution functions in low-pressure oxygen plasma columns sustained by propagating surface waves

(5) Stafford, L a Khare, R b Donnelly, V M b Margot, J a Moisan, M a

a UNIVERSITÉ DE MONTRÉAL (Canada)

b UNIVERSITY OF HOUSTON (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC SPECTROSCOPY; ATOMS; DISSOCIATION; ELECTRIC POWER DISTRIBUTION; ELECTROMAGNETIC WAVE PROPAGATION IN PLASMA; ELECTRON ENERGY ANALYZERS; ELECTRON ENERGY LEVELS; ELECTRONS; EMISSION SPECTROSCOPY; FLUID DYNAMICS; INERT GASES; ION BEAMS; LEAKAGE (FLUID); MOLECULAR SPECTROSCOPY; OPTICAL EMISSION SPECTROSCOPY; OXYGEN; PLASMAS; SURFACE WAVES; TELLURIUM COMPOUNDS; WATER WAVES; WAVES;

ELECTRON ENERGY DISTRIBUTION FUNCTIONS; ENERGY ELECTRONS; LOWER ENERGIES; METASTABLE STATES; OPTICAL-; OXYGEN PLASMAS;

DISTRIBUTION FUNCTIONS;

EID: 58349096966 PISSN: 00036951 EISSN: None Source Type: Journal
DOI: 10.1063/1.3072364 Document Type: Article

Times cited : (13)

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