Structural characterization of AlN films synthesized by pulsed laser deposition

Applied Surface Science

Volumn 257, Issue 12, 2011, Pages 5370-5374

  Szekeres, A ^a   Fogarassy, Zs ^b   Petrik, P ^b   Vlaikova, E ^a   Cziraki, A ^c   Socol, G ^d   Ristoscu, C ^d   Grigorescu, S ^d   Mihailescu, I N ^d  

^a INSTITUTE OF SOLID STATE PHYSICS   (Bulgaria)

^b RESEARCH INSTITUTE FOR TECHNICAL PHYSICS AND MATERIALS SCIENCE   (Hungary)

^c EÖTVÖS LORÁND UNIVERSITY   (Hungary)

^d NATIONAL INSTITUTE FOR LASER   (Romania)

Author keywords

Polycrystalline Aln thin films; Pulsed laser deposition; Structural investigations

Indexed keywords

ALUMINUM NITRIDE; AMORPHOUS FILMS; AMORPHOUS MATERIALS; CRYSTALLITES; DATA HANDLING; EXCIMER LASERS; HIGH RESOLUTION TRANSMISSION ELECTRON MICROSCOPY; III-V SEMICONDUCTORS; INFORMATION ANALYSIS; NITROGEN; PULSED LASER DEPOSITION; THIN FILMS; TRANSMISSION ELECTRON MICROSCOPY; X RAY DIFFRACTION;

ALN THIN FILMS; CRYSTALLITE GROWTH; EXCIMER LASER SOURCES; POLYCRYSTALLINE STRUCTURE; RESIDUAL PRESSURES; SPECTRAL ELLIPSOMETRY; STRUCTURAL CHARACTERIZATION; STRUCTURAL INVESTIGATION;

PULSED LASERS;

EID: 79952317713     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2010.10.043     Document Type: Conference Paper

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