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Volumn 519, Issue 10, 2011, Pages 3090-3094

Investigation of the properties of diamond-like carbon thin films deposited by single and dual-mode plasma enhanced chemical vapor deposition

(5) Hosseini, S I a,b Shokri, B a Firouzjah, M Abbasi a Kooshki, S a Sharifian, M c

a SHAHID BEHESHTI UNIVERSITY (Iran)

b SHAHROOD UNIVERSITY OF TECHNOLOGY (Iran)

c YAZD UNIVERSITY (Iran)

Author keywords

Diamond like carbon; Plasma enhanced chemical vapor deposition; Raman spectroscopy

Indexed keywords

DENSITY ENHANCEMENT; DIAMOND-LIKE CARBON; DIAMOND-LIKE CARBON THIN FILMS; DLC FILM; DUAL MODES; FILM STRUCTURE; GAS RATIO; GLASS SUBSTRATES; HYDROGEN CONTENTS; PEAK POSITION; POWER INCREASE; RADIO FREQUENCIES; RATE INCREASE; RF DISCHARGE; RF-POWER; SI SUBSTRATES;

CARBON FILMS; DEPOSITION; DIAMONDS; ELECTRIC DISCHARGES; EMISSION SPECTROSCOPY; HYDROGEN; LIGHT REFRACTION; METHANE; OPTICAL EMISSION SPECTROSCOPY; PLASMA DEPOSITION; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; PLASMAS; RAMAN SCATTERING; RAMAN SPECTROSCOPY; REFRACTIVE INDEX; REFRACTOMETERS; SUBSTRATES; SURFACE ROUGHNESS; VAPOR DEPOSITION;

DIAMOND LIKE CARBON FILMS;

EID: 79952316480 PISSN: 00406090 EISSN: None Source Type: Journal
DOI: 10.1016/j.tsf.2010.12.154 Document Type: Article

Times cited : (28)

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