Formation and photopatterning of nanoporous titania thin films

Applied Physics Letters

Volumn 90, Issue 23, 2007, Pages

  Park, Oun Ho ^a   Cheng, Joy Y ^a   Kim, Hyun Suk ^a   Rice, Philip M ^a   Topuria, Teya ^a   Miller, Robert D ^a   Kim, Ho Cheol ^a  

^a IBM ALMADEN RESEARCH CENTER   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CROSSLINKING; HEAT TREATMENT; PORE SIZE; TITANIUM DIOXIDE; ULTRAVIOLET RADIATION;

NANOPOROUS FILMS; PHOTOPATTERNING; TITANIUM ISOPROPOXIDE;

THIN FILMS;

EID: 34250699484     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2746081     Document Type: Article

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