Fabrication of two-and three-dimensional photonic crystals of titania with submicrometer resolution by deep x-ray lithography

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 23, Issue 3, 2005, Pages 934-939

  Awazu, Koichi ^a   Wang, Xiaomin ^a   Fujimaki, Makoto ^a   Kuriyama, Taketo ^b   Sai, Akihide ^b   Ohki, Yoshimichi ^b   Imai, Hiroaki ^c  

^a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

^b WASEDA UNIVERSITY   (Japan)

^c KEIO UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

FABRICATION; INFRARED RADIATION; OPTICAL COMMUNICATION; OPTICAL PROPERTIES; SINGLE CRYSTALS; THERMAL EXPANSION; TITANIUM COMPOUNDS; X RAY LITHOGRAPHY;

OPTICAL LOSSES; PHOTONIC CRYSTALS;

PHOTONS;

EID: 31144478000     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1924421     Document Type: Article

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