Single wavelength blue-laser optical head-like opto-mechanical system for turntable thermal mode lithography and stamper fabrication

IEEE Transactions on Magnetics

Volumn 47, Issue 3, 2011, Pages 701-705

  Yang, Chin Tien ^a   Chen, Chih Yu ^a   Huang, Chun Chieh ^a   Lee, Yuan Chin ^a   Chen, Shuen Chen ^a   Cheng, Chung Ta ^a  

^a INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE   (Taiwan)

Author keywords

Blue laser optical head; inorganic resist; lithography; nano scale pattern; thermal mode lithography

Indexed keywords

ELECTROFORMING; FABRICATION; MECHANICS; NANOTECHNOLOGY; OPTOMECHANICS; PNEUMATIC CONTROL EQUIPMENT; POWER CONTROL; QUALITY CONTROL; SURFACE ROUGHNESS;

INORGANIC RESIST; LOW SURFACE ROUGHNESS; NANO-SCALE PATTERNS; OPTICAL HEADS; OPTO-MECHANICAL MODULES; OPTO-MECHANICAL SYSTEMS; SINGLE WAVELENGTH LASERS; THERMAL MODES;

LITHOGRAPHY;

EID: 79952158861     PISSN: 00189464     EISSN: None     Source Type: Journal    
DOI: 10.1109/TMAG.2010.2101585     Document Type: Article

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