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Volumn 3740, Issue , 1999, Pages 2-5
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Solid immersion lens
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Author keywords
[No Author keywords available]
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Indexed keywords
FOCUSING;
OPTICAL DATA STORAGE;
OPTICAL MICROSCOPY;
PHOTOLITHOGRAPHY;
REFRACTIVE INDEX;
FREE SPACE;
SOLID IMMERSION LENSES (SIL);
OPTICAL INSTRUMENT LENSES;
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EID: 0032597095
PISSN: 0277786X
EISSN: None
Source Type: Conference Proceeding
DOI: None Document Type: Article |
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Times cited : (20)
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References (11)
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