XY stages driving an electron beam mastering system for high density optical recording

Microelectronic Engineering

Volumn 61-62, Issue , 2002, Pages 309-316

  Hosaka, Sumio ^a,b   Suzuki, Tatsundo ^a   Yamaoka, Masahiro ^a   Katoh, Keizo ^a   Isshiki, Fumio ^a   Miyamoto, Mitsuhide ^a   Miyauchi, Yasushi ^a   Arimoto, Akira ^a   Nishida, Tetsuya ^a  

^a HITACHI LTD   (Japan)

^b GUNMA UNIVERSITY   (Japan)

Author keywords

Electron beam mastering system; Ultrahigh density optical recording; XY stage drive

Indexed keywords

APPROXIMATION THEORY; ELECTRON BEAMS; FABRICATION; OPTICAL RECORDING;

ELECTRON BEAM MASTERING SYSTEM;

MICROELECTRONICS;

EID: 17344375409     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0167-9317(02)00498-7     Document Type: Conference Paper

References (6)

1. Optical Data Storage (ODS)