Lithography on GaMnAs layer by AFM local anodic oxidation in the AC mode

Microelectronic Engineering

Volumn 87, Issue 5-8, 2010, Pages 1066-1069

  Janousek M ^a   Halada, J ^a   Voves, J ^a  

^a CZECH TECHNICAL UNIVERSITY IN PRAGUE   (Czech Republic)

Author keywords

Atomic force microscopy; Local anodic oxidation; Nanolithography

Indexed keywords

AFM; ATOMIC FORCE MICROSCOPES; LOCAL ANODIC OXIDATION; LOCAL ANODIC OXIDATION NANOLITHOGRAPHY; MAGNETO-TRANSPORT MEASUREMENT; OXIDATION PROCESS; OXIDE LINES; POTENTIAL BARRIERS; REPRODUCIBILITIES;

ATOMIC FORCE MICROSCOPY; ATOMS; GALLIUM ALLOYS; NANOLITHOGRAPHY;

ANODIC OXIDATION;

EID: 76949099568     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2009.11.085     Document Type: Article

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