Experimental investigation of solid immersion lens lithography

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5754, Issue PART 1, 2005, Pages 254-261

  Chen, Tao ^a   Milster, Tom ^a   Nam, Dongseok ^b   Yang, Seung Hune ^a  

^a UNIVERSITY OF ARIZONA   (United States)

^b SAMSUNG Electronics   (South Korea)

Author keywords

Lithography; Near field optics; Solid immersion lens

Indexed keywords

COST EFFECTIVENESS; LENSES; MASKS; NEAR FIELD SCANNING OPTICAL MICROSCOPY; SEMICONDUCTOR LASERS; SOLIDS;

EUV; F2; NEAR-FIELD OPTICS; SOLID IMMERSION LENS (SIL);

PHOTOLITHOGRAPHY;

EID: 25144523364     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.600065     Document Type: Conference Paper

References (10)

1. M. A. McCord and M. J. Rooks, "Electron Beam Lithography", Ch. 2 in Handbook of Microlithography, Micromachining, and Microfabrication Volume 1: Microlithography, P. Rai-Choudhury, Ed., SPIE Optical Engineering Press, Bellingham, Washington, 1997, pp. 139-250.
2. T. Milster, "Near-field optical data storage: avenues for improved performance", Opt. Eng. 40(10), 2255-2260 (2001).
3. Q.Wu, L.P.Ghislain and V.B.Elings," Imaging with solid immersion lens, spatial resolution, and applications," Proceedings of IEEE 88(9), 1491-1498 (2000).
4. C.D. Poweleit, A. Gunther, S. Goodnick and J. Menéndez, "Raman imaging of patterned silicon using a solid immersion lens," Appl. Phys. Lett. 73(16), 2275-2277 (1998).
5. S. M. Mansfield, G.S.Kino, "Solid immersion microscope," Appl. Phys. Lett. 57(24), 2615-2616 (1990).
6. Tom Milster, Tao Chen, Dongseok Nam and Ed Schlesinger, "Maskless Lithography with Solid Immersion Lens Nano Probes" submitted to Photomask Technology (BACUS) (2004)
7. Tao Chen, David Felix, Sang-Ki Park, Paul Hauser, Brendan McCarthy, Dror Sarid, Christian Poweleit, Jose Menendez and Tom Milster." Near-Field Solid Immersion Lens (SIL) Microscope with Advanced Compact Mechanical Design, Proc. SPIE Int. Soc. Opt. Eng. 5380, 634 (2004)
8. http://www.optics.arizona.edu/microoptics/
9. Dongseok Nam, Tom Milster and Tao Chen, "Potential of with Solid Immersion Lithography using I-line and KrF light source", Proceedings of SPIE, Microlithography, (2005)
10. Joshua S. Jo, Tom D. Milster and J Kevin Erwin, "Phase and amplitude apodization induced by focusing through an evanescent gap in a solid immersion lens microscope", Opt. Eng. 41(8) 1866-1875 (2002)