Atomically smooth p-doped silicon nanowires catalyzed by aluminum at low temperature

ACS Nano

Volumn 5, Issue 2, 2011, Pages 1313-1320

  Moutanabbir, Oussama ^a   Senz, Stephan ^a   Scholz, Roland ^a   Alexe, Marin ^a   Kim, Yunseok ^a   Pippel, Eckhard ^a   Wang, Yewu ^a   Wiethoff, Christian ^b   Nabbefeld, Tobias ^b   Meyer Zu Heringdorf, Frank ^b   Horn Von Hoegen, Michael ^b  

^a MAX PLANCK INSTITUTE OF MICROSTRUCTURE PHYSICS   (Germany)

^b UNIVERSITY OF DUISBURG ESSEN   (Germany)

Author keywords

aluminum; metal catalyzed vapor phase epitaxy; nanowire doping; silicon (112); silicon nanowire; surface reconstruction

Indexed keywords

BUILDING BLOCKES; DOPED SILICON; EUTECTIC POINTS; FLAT SURFACES; HIGH-DENSITY; INTRINSIC PROPERTY; LOW TEMPERATURES; LOWER LIMITS; MORPHOLOGICAL PROPERTIES; P-TYPE DOPING; PRECISE MANIPULATION; SILICON NANOWIRE; SILICON NANOWIRES; STABILIZING EFFECTS; STEP EDGE; STRUCTURAL AND ELECTRICAL PROPERTIES; SURFACE DENSITY; ULTRAHIGH VACUUM CHEMICAL VAPOR DEPOSITION;

ALUMINUM; CATALYSIS; CATALYSTS; CHEMICAL VAPOR DEPOSITION; DOPING (ADDITIVES); ELECTRIC PROPERTIES; ELECTRIC WIRE; EPITAXIAL GROWTH; METALS; NANOWIRES; PHOSPHORUS; SEMICONDUCTING SILICON COMPOUNDS; SURFACE MORPHOLOGY; VAPOR PHASE EPITAXY; VAPORS;

SURFACE RECONSTRUCTION;

EID: 79951927356     PISSN: 19360851     EISSN: 1936086X     Source Type: Journal    
DOI: 10.1021/nn1030274     Document Type: Article

References (39)

1. Ciao, L.; Fan, P.; Vasudev, A. P.; White, J. S.; Yu, Z.; Cai, W.; Schuller, J. A.; Fan, S.; Brongersma, M. L. Semiconductor Nanowire Optical Antenna Solar Absorbers Nano Lett. 2010, 10, 439-445
2. Tian, B.; Kempa, T. J; Lieber, C. M. Single Nanowire Photovoltaics Chem. Soc. Rev. 2009, 38, 16-24
3. Garnett, E.; Yang, P. Light Trapping in Silicon Nanowire Solar Cells Nano Lett. 2010, 10, 1082-1087
4. Boettcher, S. W.; Spurgeon, J. M.; Putnam, M. C.; Warren, E. L.; Turner-Evans, D. B.; Kalzenberg, M. D.; Miolo, J. R.; Atwater, H. A.; Lewis, N. S. Energy-Conversion Properties of Vapor-Liquid-Solid Grown Silicon Wire-Array Photocathodes Science 2010, 327, 185-187
5. Kelzenberg, M. D.; Boettcher, S. W.; Petykiewicz, J. A.; Turner-Evans, D. B.; Putnam, M. C.; Warren, E. L.; Spurgeon, J. M.; Briggs, R. M.; Lewis, N. S.; Atwater, H. A. Enhanced Absorption and Carrier Collection in Si Wire Arrays for Photovoltaic Applications Nat. Mater. 2010, 9, 239-244
6. Garnett, E. C.; Yang, P. Silicon Nanowire Radial p - n Junction Solar Cells J. Am. Chem. Soc. 2008, 130, 9224-9225 (Pubitemid 352031121)
7. Wagner, R. S.; Ellis, W. C. Vapor-Liquid-Solid Mechanism of Single Crystal Growth Appl. Phys. Lett. 1964, 4, 89-90
8. Schwarz, K. W.; Tersoff, J. From Droplets to Nanowires: Dynamics of Vapor-Liquid-Solid Growth Phys. Rev. Lett. 2009, 102, 206101 1-4
9. Schmidt, V.; Wittemann, J. V.; Senz, S.; Gösele, U. Silicon Nanowires: A Review on Aspects of their Growth and their Electrical Properties Adv. Mater. 2009, 21, 2681-2702
10. Kodambaka, S.; Tersoff, J.; Reuter, M. C.; Ross, F. M. Germanium Nanowire Growth below the Eutectic Temperature Science 2007, 316, 729-732 (Pubitemid 46717677)
11. Kim, B. J.; Tersoff, J.; Wen, C.-Y.; Reuter, M. C.; Stach, E. A.; Ross, F. M. Determination of Size Effects during the Phase Transition of a Nanoscale Au-Si Eutectic Phys. Rev. Lett. 2009, 103, 155701 1-4
12. Sutter, E.; Sutter, P. Phase Diagram of Nanoscale Alloy Particles Used for Vapor-Liquid-Solid Growth of Semiconductor Nanowires Nano Lett. 2008, 8, 411-414 (Pubitemid 351345991)
13. Schwalbach, E. J; Voorhees, P. W. Phase Equilibrium and Nucleation in VLS-Grown Nanowires Nano Lett. 2008, 8, 3739-3745
14. Istratov, A. A.; Weber, E. R. Physics of Copper in Silicon J. Electrochem. Soc. 2002, 149, G21-G30
15. Wacaser, B. A.; Reuter, M. C.; Khayyat, M. M.; Wen, C.-Y.; Haight, R.; Guha, S.; Ross, F. M. Growth System, Structure, and Doping of Aluminum-Seeded Epitaxial Silicon Nanowires Nano Lett. 2009, 9, 3296-3301
16. Ke, Y.; Weng, X.; Redwing, J. M.; Eichfeld, C. M.; Swisher, T. R.; Mohney, S. E.; Habib, Y. M. Fabrication and Electrical Properties of Si Nanowires Synthesized by Al Catalyzed Vapor-Liquid-Solid Growth Nano Lett. 2009, 9, 4494-4499
17. Ross, F. M.; Tersoff, J.; Reuter, C. M. Sawtooth Faceting Silicon Nanowires Phys. Rev. Lett. 2005, 95, 146104 1-4
18. Wiethoff, C.; Ross, F. M.; Copel, M.; Horn-von Hoegen, M.; Meyer zu Heringdorf, F.-J. Au Stabilization and Coverage of Sawtooth Facets on Si Nanowires Grown by Vapor-Liquid-Solid Epitaxy Nano Lett. 2008, 8, 3065-3068
19. Li, F.; Nellist, P. D.; Cockayne, D. J. H. Doping-Dependent Nanofaceting on Silicon Nanowire Surfaces Appl. Phys. Lett. 2009, 94, 263111 1-3
20. Xu, T.; Nys, J. P.; Addad, A.; Lebedev, O. I.; Urbieta, A.; Salhi, B.; Berthe, M.; Grandidier, B.; Stiévenrad, D. Faceted Sidewalls of Silicon Nanowires: Au-Induced Structural Reconstructions and Electronic Properties Phys. Rev. B 2010, 81, 115403 1-10
21. Li, F.; Nellist, P. D.; Lang, C.; Cockayne, D. J. H. Dependence of Surface Facet Period on the Diameter of Nanowires ACS Nano 2010, 4, 632-636
22. Jie, J.; Zhang, W.; Peng, K.; Yuan, G.; Lee, C. S.; Lee, S.-T. Surface-Dominated Transport Properties of Silicon Nanowires Adv. Funct. Mater. 2008, 18, 3251-3257
23. Martin, P.; Aksamija, Z.; Pop, E.; Ravaioli, U. Impact of Phonon-Surface Roughness Scattering on Thermal Conductivity of Thin Si Nanowires Phys. Rev. Lett. 2009, 102, 125503 1-4
24. Wang, Y.; Schmidt, V.; Senz, S.; Gösele, U. Epitaxial Growth of Silicon Nanowires Using Aluminium Catalyst Nat. Nanotechnol. 2006, 1, 186-189
25. Hannon, J. B.; Kodambaka, S.; Ross, F. M.; Tromp, R. M. The Influence of the Surface Migration of Gold on the Growth of Silicon Nanowires Nature 2006, 440, 69-71 (Pubitemid 43336267)
26. Das, S. K.; Perepezko, J. H.; Wu, R. I.; Wilde, G. Undercooling and Glass Formation in Al-Based Alloys Mater. Sci. Eng., A 2001, 304-306, 159-165 (Pubitemid 32459356)
27. Rurali, R.; Cartoixa, X. Theory of Defects in One-Dimensional Systems: Application to Al-Catalyzed Si Nanowires Nano Lett. 2009, 9, 975-979
28. Allen, J. E.; Hemesath, E. R.; Perea, D. E.; Lensch-Falk, J. L.; Li, Z. Y.; Yin, F.; Gass, M. H.; Wang, P.; Bleloch, A. L.; Palmer, R. E.; et al. High-Resolution Detection of Au Catalyst Atoms in Si Nanowires Nat. Nanotechnol. 2008, 3, 168-173 (Pubitemid 351355141)
29. Baski, A. A.; Whitman, L. J. Quasiperiodic Nanoscale Faceting of High-Index Si Surface Phys. Rev. Lett. 1995, 74, 956-959
30. Baski, A. A.; Whitman, L. J. Ga-Induced Restructuring of Si(112) and Si(337) J. Vac. Sci. Technol. B 1996, 14, 992-994 (Pubitemid 126586549)
31. Gai, Z.; Zhao, R. G.; Yang, W. S.; Sakurai, T. Atomic Structure of the Si(112) 7 × 1-In Surface Phys. Rev. B 2000, 61, 9928-9931
32. Zavitz, D. H.; Evstigneeva, A.; Singh, R.; Fulk, C.; Trenary, M. Influence of Arsenic on the Atomic Structure of the Si(112) Surface J. Electron. Mater. 2005, 34, 839-845 (Pubitemid 40926030)
33. Cho, E. S.; Kim, M. K.; Park, J. W.; Hur, H.; Jeon, C.; Baik, J. Y.; Hwang, C. C.; Kang, T. H.; Kim, B.; An, K. S. et al. Photoemission Study on the Sb-Induced Reconstruction of the Si(112) Surfaces Surf. Sci. 2005, 591, 38-44 (Pubitemid 41334736)
34. Scheithauer, U.; Meyer, G.; Henzler, M. A New LEED Instrument for Quantitative Spot Profile Analysis Surf. Sci. 1986, 178, 441-451
35. Horn-von Hoegen, M. Growth of Semiconductor Layers Studied by Spot Profile Analysing Low Energy Electron Diffraction-Part I Z. Kistallogr. 1999, 214, 591-629
36. Meyer zu Heringdorf, F.-J.; Horn-von Hoegen, M. Reciprocal Space Mapping by Spot Profile Analyzing Low Energy Electron Diffraction Rev. Sci. Instrum. 2005, 76, 085102 1-5
37. Jung, T. M.; Prokes, S. M.; Kaplan, R. Growth and Energetics of Ga and Al Chains on Si(112) J. Vac. Sci. Technol. A 1994, 12, 1838-1842
38. Alec Talin, A.; Leonard, F.; Swartzentruber, B. S.; Wang, X.; Hersee, S. D. Unusually Strong Space-Charge-Limited Current in Thin Wires Phys. Rev. Lett. 2008, 101, 076802 1-4
39. Cutler, M; Bath, M. H. Surface Leakage Current in Rectifiers J. Appl. Phys. 1954, 25, 1440-1441