Geometrical optimization of resonant cantilevers vibrating in in-plane flexural modes

Proceedings of IEEE Sensors

Volumn , Issue , 2010, Pages 1996-1999

  Beardslee, Luke A ^a   Addous, Assim M ^a   Demirci, Kemal S ^a   Brand, Oliver ^a   Heinrich, Stephen M ^b   Josse, Fabien ^b  

^a GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

^b Marquette University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BEAM GEOMETRY; DESIGN GUIDELINES; EXPERIMENTAL DATA; FLEXURAL MODES; GEOMETRICAL OPTIMIZATION; IN-PLANE; MASS LOADINGS; OUT-OF-PLANE; OUT-OF-PLANE BENDING; Q-FACTORS; QUALITY FACTORS; RESONANCE FREQUENCIES; RESONANT CANTILEVER; SILICON CANTILEVER BEAM; SILICON LAYER;

Q FACTOR MEASUREMENT; RESONANCE; SENSORS;

NANOCANTILEVERS;

EID: 79951923497     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ICSENS.2010.5689930     Document Type: Conference Paper

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