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Volumn 131, Issue 1, 2011, Pages

Milestones achieved in IGBT development over the last 25 years (1984-2009)

Author keywords

FS IGBT; IEGT; IGBT; Non Latch Up; Power semiconductor device; Silicon limit

Indexed keywords

FS-IGBT; IEGT; IGBT; NON-LATCH-UP; POWER SEMICONDUCTOR DEVICE; SILICON LIMIT;

EID: 79951903116     PISSN: 09136339     EISSN: 13488163     Source Type: Journal    
DOI: 10.1541/ieejias.131.1     Document Type: Article
Times cited : (7)

References (66)
  • 1
    • 79951912039 scopus 로고    scopus 로고
    • http://www2.iee.or.jp/ver2/honbu/30-foundation/data07/press/press3-all. pdf
  • 2
    • 79951892602 scopus 로고    scopus 로고
    • http://www.ieee.org/about/awards/tfas/newell.html
  • 3
    • 79951879839 scopus 로고    scopus 로고
    • Power semiconductor devices driving the world
    • Dec. 25, (in Japanese)
    • "Power Semiconductor Devices Driving the World", IEEJ, The Book Plan Editing Committee of IGBT (Dec. 25,2008) (in Japanese)
    • (2008) IEEJ, the Book Plan Editing Committee of IGBT
  • 5
    • 0020310822 scopus 로고
    • The insulated gate rectifier (IGR): A new power switching device
    • Dec. 14
    • B.J. Baliga, M.S. Adler, P.V. Gray, R.P. Love, and N. Zommer: "The Insulated Gate Rectifier (IGR): A New Power Switching Device", Tech. Dig. IEDM'82, pp.264-267 (Dec. 14, 1982)
    • (1982) Tech. Dig. IEDM'82 , pp. 264-267
    • Baliga, B.J.1    Adler, M.S.2    Gray, P.V.3    Love, R.P.4    Zommer, N.5
  • 8
    • 79951917790 scopus 로고    scopus 로고
    • Development story of non-latch-Up IGBT
    • EDD-08-55/SPC-08-142, (in Japanese) [Non-Latch-Up IGBT], EDD-08-55/SPC-08-142, pp.51-56 (2008-10-23)
    • A. Nakagawa: "Development Story of Non-Latch-Up IGBT', IEEJ Joint Tech. Meeting, EDD-08-55/SPC-08-142, pp.51-56 (2008-10) (in Japanese) [Non-Latch-Up IGBT], EDD-08-55/SPC-08-142, pp.51-56 (2008-10-23)
    • (2008) IEEJ Joint Tech. Meeting , pp. 51-56
    • Nakagawa, A.1
  • 9
    • 79951874202 scopus 로고    scopus 로고
    • The development histories of early IGBT and SOI inverter IC
    • Kariya (in Japanese)
    • A. Nakagawa: "The Development Histories of Early IGBT and SOI Inverter IC", Tokai Branch of IEEJ, Tech. lecture, Kariya (2009-1) (in Japanese)
    • (2009) Tokai Branch of IEEJ, Tech. Lecture
    • Nakagawa, A.1
  • 11
    • 0027891679 scopus 로고
    • A 4500V Injection Enhanced Insulated Gate Bipolar Transistor (IEGT) Operating in a Mode Similar to a Thyristor
    • M. Kitagawa, I. Omura, S. Hasegawa, T. Inoue, and A. Nakagawa: "A 4500V Injection Enhanced Insulated Gate Bipolar Transistor (IEGT) Operating in a Mode Similar to a Thyristor", Tech. Dig. IEDM'93, pp.679-682 (1993-12)
    • (1993) Tech. Dig. IEDM'93 , pp. 679-682
    • Kitagawa, M.1    Omura, I.2    Hasegawa, S.3    Inoue, T.4    Nakagawa, A.5
  • 15
    • 79951862845 scopus 로고    scopus 로고
    • Milestones along the IGBT Development through the last 25 Years (1984-2009)
    • EFM-09-29/EDD-09-63/SPC-O9-130, (in Japanese) EFM-09-29/EDD-09-63/SPC-09- 130, pp.67-74 (2009-10-29)
    • N. Tokura: "Milestones along the IGBT Development through the last 25 Years (1984-2009)", IEEJ Joint Tech. Meeting, EFM-09-29/EDD-09-63/SPC- O9-130, pp.67-74 (2009-10) (in Japanese) EFM-09-29/EDD-09-63/SPC-09-130, pp.67-74 (2009-10-29)
    • (2009) IEEJ Joint Tech. Meeting , pp. 67-74
    • Tokura, N.1
  • 17
    • 0020902405 scopus 로고
    • High Voltage High Power Transistor Modules for 440 v AC Line Voltage Inverter Applications
    • H. Nishiumi, I. Takata, Y. Takagi, and S. Kojima: "High Voltage High Power Transistor Modules for 440 V AC Line Voltage Inverter Applications", Proc. IPEC-Tokyo, pp.297-305 (1983-3)
    • (1983) Proc. IPEC-Tokyo , pp. 297-305
    • Nishiumi, H.1    Takata, I.2    Takagi, Y.3    Kojima, S.4
  • 18
    • 79951927957 scopus 로고    scopus 로고
    • private communication with Dr. Akio Nakagawa
    • private communication with Dr. Akio Nakagawa
  • 19
    • 79951882166 scopus 로고    scopus 로고
    • private communication with Mr. Ikunori Takata
    • private communication with Mr. Ikunori Takata
  • 20
    • 0020243176 scopus 로고
    • A time- and temperature- dependent simulation of the GTO turn-off process
    • A. Nakagawa and D.H. Navon: "A Time- and Temperature- Dependent Simulation of the GTO Turn-Off Process", Tech. Dig. IEDM'82, pp.496-499 (1982-12)
    • (1982) Tech. Dig. IEDM'82 , pp. 496-499
    • Nakagawa, A.1    Navon, D.H.2
  • 22
    • 0021610062 scopus 로고
    • High voltage bipolar-mode MOSFET with high current capability
    • A. Nakagawa, H. Ohashi, and T. Tsukakoshi: "High Voltage Bipolar-Mode MOSFET with High Current Capability", Ext. Abs. SSDM'84, pp.309-312 (1984-8)
    • (1984) Ext. Abs. SSDM'84 , pp. 309-312
    • Nakagawa, A.1    Ohashi, H.2    Tsukakoshi, T.3
  • 23
    • 0022291590 scopus 로고
    • Experimental and numerical study of non-latch-up bipolar-mode MOSFET characteristics
    • A. Nakagawa, Y. Yamaguchi, K. Watanabe, H. Ohashi, and M. Kurata: "Experimental and Numerical Study of Non-Latch-Up Bipolar-Mode MOSFET Characteristics", Tech. Dig. IEDM'85, pp.150-153 (1985-12)
    • (1985) Tech. Dig. IEDM'85 , pp. 150-153
    • Nakagawa, A.1    Yamaguchi, Y.2    Watanabe, K.3    Ohashi, H.4    Kurata, M.5
  • 24
    • 79951895715 scopus 로고
    • Quiet friendly technology for inverters
    • EDD-89-53/SPC-89-62 (in Japanese)
    • C. Okado: "Quiet Friendly Technology for Inverters", IEEJ Joint Tech. Meeting, EDD-89-53/SPC-89-62, pp.59-67 (1989-10) (in Japanese)
    • (1989) IEEJ Joint Tech. Meeting , pp. 59-67
    • Okado, C.1
  • 25
    • 0022880985 scopus 로고
    • 1800 v Non-latch-up Bipolar-mode MOSFETs (IGBT) Fabricated by Silicon Wafer Direct Bonding
    • A. Nakagawa, Y. Yamaguchi, K. Watanabe, H. Ohashi, and M. Shimbo: "1800 V Non-latch-up Bipolar-mode MOSFETs (IGBT) Fabricated by Silicon Wafer Direct Bonding", Ext. Abst. SSDM'86, pp.89-92 (1986-8)
    • (1986) Ext. Abst. SSDM'86 , pp. 89-92
    • Nakagawa, A.1    Yamaguchi, Y.2    Watanabe, K.3    Ohashi, H.4    Shimbo, M.5
  • 27
    • 0028706647 scopus 로고
    • 600 v Trench IGBT in comparison with Planar IGBT - An evaluation of the limit of IGBT performance
    • M. Harada, T. Minato, H. Takahashi, H. Nishihara, K. Inoue, and I. Takata: "600 V Trench IGBT in comparison with Planar IGBT - An Evaluation of the Limit of IGBT Performance - ", Proc. ISPSD'94, pp.411-416 (1994-5)
    • (1994) Proc. ISPSD'94 , pp. 411-416
    • Harada, M.1    Minato, T.2    Takahashi, H.3    Nishihara, H.4    Inoue, K.5    Takata, I.6
  • 29
    • 0024170931 scopus 로고
    • An Insulated Gate Bipolar Transistor with a Self-aligned DMOS Structure
    • M. Mori, Y. Nakano, and T. Tanaka: "An Insulated Gate Bipolar Transistor with a Self-aligned DMOS Structure", Tech. Dig. IEDM'88, pp.813-816 (1988-12)
    • (1988) Tech. Dig. IEDM'88 , pp. 813-816
    • Mori, M.1    Nakano, Y.2    Tanaka, T.3
  • 30
    • 0031621220 scopus 로고    scopus 로고
    • Effect of trench-sidewall smoothing on on-state voltage of injection enhancement gate transistor
    • A. Yahata, S. Urano, T. Inoue, and T. Shinohe: "Effect of Trench-Sidewall Smoothing on On-State Voltage of Injection Enhancement Gate Transistor", Proc. ISPSD'98, pp.273-276 (1998-6)
    • (1998) Proc. ISPSD'98 , pp. 273-276
    • Yahata, A.1    Urano, S.2    Inoue, T.3    Shinohe, T.4
  • 31
  • 32
    • 3743155180 scopus 로고    scopus 로고
    • Study of 4.5 kV MOS-power device with injection-enhanced trench gate structure
    • Part 1
    • M. Kitagawa and A. Nakagawa: "Study of 4.5 kV MOS-Power Device with Injection-Enhanced Trench Gate Structure", Jpn. J. Appl. Physics, Vol.36, Part 1, No.3B, pp.1411-1414 (1997-3)
    • (1997) Jpn. J. Appl. Physics , vol.36 , Issue.3 B , pp. 1411-1414
    • Kitagawa, M.1    Nakagawa, A.2
  • 33
    • 33747174327 scopus 로고
    • Static and dynamic characteristics of high voltage (3.5 kV) IGBT and MCT devices
    • F. Bauer and T. Stockmeier: "Static and Dynamic Characteristics of High Voltage (3.5 kV) IGBT and MCT Devices", Proc. ISPSD'92, pp.22-27 (1992-5)
    • (1992) Proc. ISPSD'92 , pp. 22-27
    • Bauer, F.1    Stockmeier, T.2
  • 34
    • 0030683093 scopus 로고    scopus 로고
    • Ultrathin-Wafer Technology for a new 600 V-NPT-IGBT
    • T. Laska, M. Matschitsch, and W. Scholts: "Ultrathin-Wafer Technology for a new 600 V-NPT-IGBT', Proc. ISPSD-97, pp.361-364 (1997-5)
    • (1997) Proc. ISPSD-97 , pp. 361-364
    • Laska, T.1    Matschitsch, M.2    Scholts, W.3
  • 38
    • 79951913797 scopus 로고    scopus 로고
    • private communication with Dr. Mitsuhiko Kitagawa
    • private communication with Dr. Mitsuhiko Kitagawa
  • 39
    • 0030721270 scopus 로고    scopus 로고
    • Carrier injection enhancement effect of high voltage MOS devices - Device physics and design concept
    • I. Omura, T. Ogura, K. Sugiyama, and H. Ohashi: "Carrier Injection Enhancement Effect of High Voltage MOS Devices - Device Physics and Design Concept - ", Proc. ISPSD'97, pp.217-220 (1997-5)
    • (1997) Proc. ISPSD'97 , pp. 217-220
    • Omura, I.1    Ogura, T.2    Sugiyama, K.3    Ohashi, H.4
  • 40
    • 0029709790 scopus 로고    scopus 로고
    • Carrier stored trench-gate bipolar transistor (CSTBT) - A Novel Power Device for High Voltage Application
    • H. Takahashi, H. Haruguchi, H. Hagino, and T. Yamada: "Carrier Stored Trench-Gate Bipolar Transistor (CSTBT) - A Novel Power Device for High Voltage Application - ", Proc. ISPSD'96, pp.349-356 (1996-5)
    • (1996) Proc. ISPSD'96 , pp. 349-356
    • Takahashi, H.1    Haruguchi, H.2    Hagino, H.3    Yamada, T.4
  • 41
    • 0031622354 scopus 로고    scopus 로고
    • A Novel High-Conductivity IGBT (HiGT) with a Short Circuit Capability
    • M. Mori, Y. Uchino, J. Sakano, and H. Kobayashi: "A Novel High-Conductivity IGBT (HiGT) with a Short Circuit Capability", Proc. ISPSD'98, pp.429-432 (1998-6)
    • (1998) Proc. ISPSD'98 , pp. 429-432
    • Mori, M.1    Uchino, Y.2    Sakano, J.3    Kobayashi, H.4
  • 45
    • 0029700087 scopus 로고    scopus 로고
    • Design considerations and characteristics of rugged punchthrough (PT) IGBTs with 4.5 kV blocking capability
    • F. Bauer, H. Dettmer, W. Fichtner, H. Lendenmann, T. Stockmeier, and U. Thiemann: "Design Considerations and Characteristics of Rugged Punchthrough (PT) IGBTs with 4.5 kV Blocking Capability", Proc. ISPSD'96, pp.327-330 (1996-5)
    • (1996) Proc. ISPSD'96 , pp. 327-330
    • Bauer, F.1    Dettmer, H.2    Fichtner, W.3    Lendenmann, H.4    Stockmeier, T.5    Thiemann, U.6
  • 47
    • 4944243916 scopus 로고    scopus 로고
    • 1200 v FS-IGBT Module with Enhanced Dynamic Clamping Capability
    • M. Otsuki, Y. Onozawa, S. Yoshiwatari, and Y. Seki: "1200 V FS-IGBT Module with Enhanced Dynamic Clamping Capability", Proc. ISPSD'04, pp.339-342 (2004-5)
    • (2004) Proc. ISPSD'04 , pp. 339-342
    • Otsuki, M.1    Onozawa, Y.2    Yoshiwatari, S.3    Seki, Y.4
  • 48
    • 0031333122 scopus 로고    scopus 로고
    • IGBT negative gate capacitance and related instability effects
    • I. Omura, H. Ohashi, and W. Fichtner: "IGBT Negative Gate Capacitance and Related Instability Effects", IEEE Electron Device Lett., Vol. 18, No. 12, pp.622-624 (1997-12)
    • (1997) IEEE Electron Device Lett. , vol.18 , Issue.12 , pp. 622-624
    • Omura, I.1    Ohashi, H.2    Fichtner, W.3
  • 49
    • 77954451728 scopus 로고    scopus 로고
    • Influence of floating P-base on turn-on characteristics of trench-gate FS-IGBT
    • (in Japanese)
    • N. Tokura: "Influence of Floating P-Base on Turn-On Characteristics of Trench-Gate FS-IGBT', IEEJ Trans. IA, Vol. 130, No.6, pp.728-733 (2010-6) (in Japanese)
    • (2010) IEEJ Trans. IA , vol.130 , Issue.6 , pp. 728-733
    • Tokura, N.1
  • 53
    • 85072426833 scopus 로고    scopus 로고
    • Power control unit for high power hybrid system
    • 200701-0271
    • Y. Sakai, H. Ishiyama, and T. Kikuchi: "Power Control Unit for High Power Hybrid System", SAE Technical Paper, 2007-01-0271 (2007-4)
    • (2007) SAE Technical Paper
    • Sakai, Y.1    Ishiyama, H.2    Kikuchi, T.3
  • 54
    • 34247485035 scopus 로고    scopus 로고
    • Theoretical investigation of silicon limit characteristics of IGBT
    • A. Nakagawa: "Theoretical Investigation of Silicon Limit Characteristics of IGBT', Proc. ISPSD'06, pp.5-8 (2006-6)
    • (2006) Proc. ISPSD'06 , pp. 5-8
    • Nakagawa, A.1
  • 55
    • 77955647030 scopus 로고    scopus 로고
    • Silicon limit electrical characteristics of power devices and ICs
    • A. Nakagawa, Y. Kawaguchi, and K. Nakamura: "Silicon Limit Electrical Characteristics of Power Devices and ICs", Proc. ISPS2008, pp.26-28 (2008-8)
    • (2008) Proc. ISPS2008 , pp. 26-28
    • Nakagawa, A.1    Kawaguchi, Y.2    Nakamura, K.3
  • 56
    • 79951902345 scopus 로고    scopus 로고
    • private communication with Ms. Tomoko Matsudai
    • private communication with Ms. Tomoko Matsudai
  • 57
    • 79951876832 scopus 로고    scopus 로고
    • Potential of 600 v Trench Gate IGBT Having Lower On-State Voltage Drop than Diodes
    • T. Matsudai and A. Nakgawa: "Potential of 600 V Trench Gate IGBT Having Lower On-State Voltage Drop than Diodes", Toshiba Review, Vol.54, No.11, pp.28-31 (1999-11)
    • (1999) Toshiba Review , vol.54 , Issue.11 , pp. 28-31
    • Matsudai, T.1    Nakgawa, A.2
  • 58
    • 0027307189 scopus 로고
    • The DMOS consisting of channel region defined by LOCOS (LOCOS-DMOS): A new process/device technology for low on-resistance power MOSFET
    • N. Tokura, S. Takahashi, and K. Hara: "The DMOS Consisting of Channel Region Defined by LOCOS (LOCOS-DMOS): A New Process/Device Technology for Low On-Resistance Power MOSFET', Proc. ISPSD'93, pp.135-140 (1993-5)
    • (1993) Proc. ISPSD'93 , pp. 135-140
    • Tokura, N.1    Takahashi, S.2    Hara, K.3
  • 62
    • 79951860222 scopus 로고    scopus 로고
    • Basics and application of SiC device
    • (in Japanese)
    • K. Arai and S. Yoshida: "Basics and application of SiC device", Ohmsha (2003-3) (in Japanese)
    • (2003) Ohmsha
    • Arai, K.1    Yoshida, S.2
  • 63
    • 79951903701 scopus 로고    scopus 로고
    • Technology innovation and application of power electronics
    • (in Japanese)
    • K. Arai: 'Technology innovation and application of power electronics", Ohmsya, OHM, Vol.96, No. 11, pp.34-38 (2009-11) (in Japanese)
    • (2009) Ohmsya, OHM , vol.96 , Issue.11 , pp. 34-38
    • Arai, K.1
  • 64
    • 0025567368 scopus 로고
    • Bipolar MOS power device simulator TONADDEIIC taking into account external circuit
    • A. Nakagawa and K. Sato: "Bipolar MOS Power Device Simulator TONADDEIIC Taking into Account External Circuit", Proc. ISPSD'90, pp.32-37 (1990-4).
    • (1990) Proc. ISPSD'90 , pp. 32-37
    • Nakagawa, A.1    Sato, K.2
  • 65
    • 79951917789 scopus 로고    scopus 로고
    • A Simple Emulation of IGBTs Forward Action by a Partial pin Diode
    • EFM-09-25/EDD-09-59/SPC-O9-126, (in Japanese)
    • I. Takata: "A Simple Emulation of IGBTs Forward Action by a Partial pin Diode", IEEJ Joint Tech. Meeting, EFM-09-25/EDD-09-59/SPC-O9-126, pp.49-54 (2009-10) (in Japanese)
    • (2009) IEEJ Joint Tech. Meeting , pp. 49-54
    • Takata, I.1
  • 66
    • 79951926079 scopus 로고
    • JP Pat. Publication 47-21739 Jun. 19
    • K. Yamagami and Y. Akagiri: "Transistor', JP Pat. Publication 47-21739 (Jun. 19, 1972)
    • (1972) Transistor
    • Yamagami, K.1    Akagiri, Y.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.