A temperature sensor from a self-assembled carbon nanotube microbridge

Proceedings of IEEE Sensors

Volumn , Issue , 2010, Pages 2369-2372

  De Volder, M ^a,b   Reynaerts, D ^b   Van Hoof, C ^a   Tawfick, S ^c   Hart, A J ^c  

^a IMEC   (Belgium)

^b UNIVERSITY OF LEUVEN   (Belgium)

^c UNIVERSITY OF MICHIGAN   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BATCH PROCESSING; DIELECTROPHORESIS; FABRICATION METHOD; HIGH SENSITIVITY; LOW-POWER CONSUMPTION; MICRO-BRIDGE; MICROBRIDGES; PATTERNED ELECTRODE; PIECE-WISE; RAPID RESPONSE; READOUT ELECTRONICS; SELF-ASSEMBLED; SENSOR ARCHITECTURES;

ELECTROPHORESIS; FABRICATION; INDUSTRIAL RESEARCH; SELF ASSEMBLY; TEMPERATURE SENSORS;

CARBON NANOTUBES;

EID: 79951864431     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ICSENS.2010.5690868     Document Type: Conference Paper

References (24)

1. T.W. Ebbesen et al., "Electrical conductivity of individual carbon nanotubes", Nature, Vol 382, pp. 54-56, 1996.
2. V. T. Dau et al., "Integration of SWNT film into MEMS for a microthermoelectric device", Smart Materials and structures 19, 075003, 2010.
3. S. Selvarasah et al., "A Three Dimensional Thermal Sensor Based on Single-Walled Carbon Nanotubes".
4. K. M. Carmen et al., "Dielectrophoretic Batch Fabrication of Bundled Carbon Nanotube Thermal Sensors", IEEE Trans. Nanotechnology 3, pp. 395-403, 2004.
5. th IEEE Conference on Nanotechnology, pp. 158-160, 2004.
6. K. M. Carmen, et al., "Towards batch fabrication of bundled carbon nanotube thermal sensors", IEEE-Nano 2003, 2 pp. 866-869, 2003.
7. E. Obermeier et al., "Polysilicon as a material for microsensor applications", Sensors and Actuators A 30, pp. 149-155, 1992.
8. C.-Y. Lee et al., "Micromachine-based humidity sensors with integrated temperature sensors for signal drift compensation", J. Micromech. Microeng. 13, pp. 620-627, 2003.
9. C. Stampfer et al.,Fabrication of Single-Walled Carbon-Nanotube- Based Pressure Sensors. Nano Letters 6, pp. 233-237, 2006.
10. J. Cumings et al., "Low-Friction Nanoscale Linear Bearing Realized from Multiwall Carbon Nanotubes." Science 289: 602-604, 2000. (Pubitemid 30622059)
11. P.A. Williams et al.,Controlled Placement of an Individual Carbon Nanotube onto a Microelectromechanical Structure. Applied Physics Letters; 80: pp. 2574-2576, 2002.
12. R. Krupke et al., "Surface Conductance Induced Dielectrophoresis of Semiconducting Single-Walled Carbon Nanotubes". Nano Letters 4: 1395-1399, 2004. (Pubitemid 39186321)
13. A. Vijayaraghavan et al.,Ultra-Large-Scale Directed Assembly of Single-Walled Carbon Nanotube Devices. Nano Letters 7: 1556-1560, 2007. (Pubitemid 47140424)
14. J.Y. Chung et al., "Toward Large-Scale Integration of Carbon Nanotubes." Langmuir 20: pp. 3011-3017, 2004.
15. M.A. Guillorn et al., "Fabrication of Gated Cathode Structures Using an in Situ Grown Vertically Aligned Carbon Nanofiber as a Field Emission Element". Journal of Vacuum Science & Technology B 19: pp. 573-578, 2001.
16. M.A. Guillorn et al., "Individually Addressable Vertically Aligned Carbon Nanofiber-Based Electrochemical Probes". Journal of Applied Physics 91: pp. 3824-3828, 2002.
17. M. De Volder, et al., "Diverse 3D Microarchitectures Made by Capillary Forming of Carbon Nanotubes". Advanced Materials 2010; (in press).
18. N. Chakrapani, et al., "Capillarity-driven assembly of two-dimensional cellular carbon nanotube foams" Proceedings of the National Academy of Sciences of the United States of America, vol 101, pp. 4009-4012, 2004.
19. H. Liu, et al., "Self-Assembly of Large-Scale Micropatterns on Aligned Carbon Nanotube" Angewandte Chemie-International Edition, 43, 1146; 2004.
20. D. N. Futaba, et al., "Shape-engineerable and highly densely packed single-walled carbon nanotubes and their application as super-capacitor electrodes", Nature Materials, 5, 987, 2006.
21. Y. Hayamizu, et al., 'Integrated three-dimensional microelectromechanical devices from processable carbon nanotube wafers' Nature Nanotechnology, 3, 289, 2008.
22. A. J. Hart, et al., 'Rapid growth and flow-mediated nucleation of millimeter-scale aligned carbon nanotube structures from a thin-film catalyst' Journal of Physical Chemistry B, 110, 8250, 2006.
23. K. Hata et al., 'Water-Assisted Highly Efficient Synthesis of Impurity- Free Single-Walled Carbon Nanotubes', Science, 306, 1362, 2004.
24. E.R. Meshot et al. "Engineering vertically aligned carbon nanotube growth by decoupled thermal treatment of precursor and catalyst." ACS Nano 3(9):2477-2486, 2009.