Boron nitride coatings by chemical vapor deposition from borazine

Surface and Coatings Technology

Volumn 205, Issue 12, 2011, Pages 3736-3741

  Li, Jun Sheng ^a   Zhang, Chang Rui ^a   Li, Bin ^a   Cao, Feng ^a   Wang, Si Qing ^a  

^a NATIONAL UNIVERSITY OF DEFENSE TECHNOLOGY   (China)

Author keywords

Borazine; Boron nitride; Chemical vapor deposition; Coatings

Indexed keywords

BASAL PLANES; BORAZINE; COMPACT STRUCTURES; CROSS-SECTIONAL MORPHOLOGY; DEPOSITED COATINGS; LAMINAR STRUCTURE; LOW DEPOSITION TEMPERATURE; NITRIDE COATING; PREFERENTIAL ORIENTATION; SINGLE-SOURCE PRECURSOR; SUBSTRATE INTERFACE; TEM; TOTAL PRESSURE; TURBOSTRATIC; XRD;

BORON; COATINGS; MORPHOLOGY; NITRIDES;

CHEMICAL VAPOR DEPOSITION;

EID: 79951681891     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2011.01.032     Document Type: Article

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