Boron nitride films synthesized by RF plasma CVD of borane-ammonia and nitrogen

Materials Chemistry and Physics

Volumn 76, Issue 2, 2002, Pages 130-136

  Deb, B ^a   Bhattacharjee, B ^a   Ganguli, A ^a   Chaudhuri, S ^a   Pal, A K ^a  

^a DEPARTMENT OF MATERIALS SCIENCE   (India)

Author keywords

Boron nitride; FTIR; RF plasma CVD

Indexed keywords

ATOMIC FORCE MICROSCOPY; BAND STRUCTURE; FOURIER TRANSFORM INFRARED SPECTROSCOPY; FUSED SILICA; PHASE COMPOSITION; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; QUARTZ; REFRACTIVE INDEX; SCANNING ELECTRON MICROSCOPY; SEMICONDUCTING FILMS; SURFACE PHENOMENA; SYNTHESIS (CHEMICAL); TEXTURES;

SURFACE TEXTURES;

CUBIC BORON NITRIDE;

EID: 0037102795     PISSN: 02540584     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0254-0584(01)00524-7     Document Type: Article

References (20)