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Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics

Volumn 27, Issue 3, 2009, Pages 1048-1052

Laser micromachining of optical microstructures with inclined sidewall profile

(3) Wang, X H a Lai, P T a Choi, H W a

a UNIVERSITY OF HONG KONG (Hong Kong)

Author keywords

[No Author keywords available]

Indexed keywords

COMPOSITE MICROMECHANICS; LIGHT EMITTING DIODES; MICROMACHINING; MICROSTRUCTURE; SEMICONDUCTOR LASERS; THREE DIMENSIONAL;

CONIC SECTIONS; FOCUSING OPTICS; LASER MICRO-MACHINING; LASER-INDUCED DAMAGE; MECHANICAL TREATMENTS; NANOSECOND ULTRAVIOLET LASER; OBLIQUE ANGLES; OPTICAL MICROSTRUCTURES; OPTICAL PATH; RESOLIDIFICATION; SIDEWALL PROFILES; THREE-DIMENSIONAL STRUCTURE;

ULTRAVIOLET LASERS;

EID: 79651469432 PISSN: 21662746 EISSN: 21662754 Source Type: Journal
DOI: 10.1116/1.3117344 Document Type: Conference Paper

Times cited : (22)

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