Microphotonic elements for integration on the silicon-on-insulator waveguide platform

IEEE Journal on Selected Topics in Quantum Electronics

Volumn 12, Issue 6, 2006, Pages 1402-1414

  Janz, Siegfried ^a,b,d   Cheben, Pavel ^b,c   Dalacu, Dan ^b   Delâge, André ^b   Densmore, Adam ^b   Lamontagne, Boris ^b,d   Picard, Marie Josee ^b   Post, E ^b   Schmid, J H ^b   Waldron, P ^b   Xu, Dan Xia ^b,d   Yap, K P ^b,d   Ye, Winnie N ^b,d  

^a IEEE   (Canada)

^b NATIONAL RESEARCH COUNCIL CANADA   (Canada)

^c UNIVERSIDAD COMPLUTENSE DE MADRID   (Spain)

^d CARLETON UNIVERSITY   (Canada)

Author keywords

Birefringence; Integrated optics; Multimode interference couplers; Ring resonators; Silicon photonics; Silicon on insulator; Waveguide couplers; Waveguides

Indexed keywords

MULTIMODE INTERFERENCE COUPLERS; SILICON ON INSULATOR; SILICON PHOTONICS; TOTAL INTERNAL REFLECTION;

BIREFRINGENCE; INTEGRATED OPTICS; LIGHT POLARIZATION; MIRRORS; OPTICAL WAVEGUIDES; REFLECTION; WAVEGUIDE COUPLERS;

OPTICAL MATERIALS;

EID: 33845656795     PISSN: 1077260X     EISSN: None     Source Type: Journal    
DOI: 10.1109/JSTQE.2006.880612     Document Type: Article

References (69)

1. G. T. Reed and A. P. Knights, Silicon Photonics: An Introduction. Chichester, U.K.: Wiley, 2004.
2. L. Pavesi and D. J. Lockwood, Silicon Photonics. Berlin, Germany: Springer-Verlag, 2004.
3. B. Lemoff and M. Haney, Optical Interconnects: Thinking Inside of the Box. Washington, DC: Optoelectronics Ind. Dev. Assoc., 2005.
4. Q. Xu, V. R. Almeida, and M. Lipson, "Experimental demonstration of guiding and confining light in nanometer-size low-refractive-index material," Opt. Lett., vol. 29, pp. 1626-1628, Jul. 2004.
5. D. M. Pustai, S. Shi, C. Chen, A. Sharkawy, and D. W. Prather, "Analysis of splitters for self collimated beams in planar photonic crystals," Opt. Express, vol. 12, pp. 1823-1821, May 2004.
6. M. Notomi, A. Shinya, K. Yamada, J. Takahashi, C. Tkkahashi, and I. Yokohama, "Structural tuning of guiding modes of line-defect waveguides in silicon-on-insulator photonic crystal slabs," IEEE J. Quantum Electron., vol. 38, no. 7, pp. 736-742, Jul. 2002.
7. A. Sure, T. Dillon, J. Murakowski, C. Lin, D. Pustai, and D. Prather, "Fabrication and characterization of three-dimensional silicon tapers," Opt. Express, vol. 11, pp. 3555-3561, Dec. 2003.
8. V. R. Almeida, R. R. Panepucci, and M. Lipson, "Nanotaper for compact mode conversion," Opt. Lett., vol. 28, pp. 1302-1304, Aug. 2003.
9. K. K. Lee, D. R. Lim, D. Pan, C. Hoepfner, W.-Y. Oh, K. Wada, L. C. Kimmerling, K. P. Yap, and M. T. Doan, "Mode transformer for miniaturized optical circuits," Opt. Lett., vol. 30, pp. 498-500, Mar. 2005.
10. G. Z. Masanovic, V. M. N. Passaro, and G. T. Reed, "Dual grating-assisted directional coupling between fibers and thin semiconductor waveguides," IEEE Photon. Technol. Lett., vol. 15, no. 10, pp. 1395-1397, Oct. 2003.
11. D. Taillert, H. Chong, P. I. Borel, L. H. Fransden, R. M. de la Rue, and R. Baets, "A compact two-dimensional grating coupler used as a polarization splitter," IEEE Photon. Technol. Lett., vol. 15, no. 9, pp. 1249-1251, Sep. 2003.
12. T. Barwicz and H. A. Haus, "Three dimensional analysis of scattering losses due to sidewall roughness in microphotonic waveguides," J. Lightw. Technol., vol. 23, no. 9, pp. 2719-2732, Sep. 2005.
13. F. P. Payne and J. P. R. Lacey, "A theoretical analysis of scattering loss from planar optical waveguides," Opt. Quantum Electron., vol. 26, pp. 977-986, 1994.
14. 2 waveguides by roughness reduction," Opt. Lett., vol. 26, pp. 1888-1890, Dec. 2001.
15. S. Lardenois, D. Pascal, L. Vivien, E. Cassan, S. Laval, R. Orobtchoul, M. Heitzmann, N. Bouzaida, and L. Mollard, "Low loss submicrometer silicon-on-insulator rib waveguides and corner mirrors," Opt. Lett., vol. 28, pp. 1150-1152, Jul. 2003.
16. P. Dumon, W. Bogaerts, V. Wiaux, J. Wouters, S. Beckx, J. V. Campenhout, D. Taillaert, B. Lussyaert, P. Bienstman, D. V. Thourhout, and R. Baets, "Low-loss SOI photonic wires and ring resonators fabricated with deep UV lithography," IEEE Photon. Technol. Lett., vol. 16, no. 5, pp. 1328-1330, May 2004.
17. A. F. Milton and W. K. Burns, "Mode coupling in optical waveguide horns," IEEE J. Quantum Electron., vol. QE-13, no. 10, pp. 828-835, Oct. 1977.
18. D. W. Prather, J. Murakowski, S. Shi, S. Venkataraman, A. Sharkawy, C. Chen, and D. Pustai, "High efficiency coupling structure for a single line defect photonic crystal waveguide," Opt. Lett., vol. 27, pp. 1601-1603, Sep. 2002.
19. C. Manolatou and H. A. Haus, Passive Components for Dense Optical Integration. Boston, MA: Kluwer, 2002.
20. K. Shiraishi, C. S. Tsai, H. Yoda, and K. Minagawa, "A micro-GRIN slab tip for integrating coupling between superfine-core waveguides and single mode fibers," in Proc. CLEO/Pacific RIM 2003,2003, CD-ROM.
21. A. Delâge, S. Janz, D.-X. Xu, D. Dalacu, B. Lamontagne, and A. Bogdanov, "Graded-index coupler for microphotonic waveguides," in Proc. SPIE, 2004, vol. 5577, pp. 204-212.
22. K. Izuka, Engineering Optics, 2nd ed. Berlin, Germany: Springer-Verlag, 1987.
23. A. Delâge, S. Janz, B. Lamontagne, A. Bogdanov, D. Dalacu, D.-X. Xu, and K. P. Yap, "Monolithically integrated asymmetric graded and step-index couplers for microphotonic waveguides," Opt. Express, vol. 14, pp. 148-161, 2006.
24. M. Schnarrenberger, L. Zimmerman, T. Mitze, J. Bruns, and K. Petermann, "Facet preparation of SOI waveguides by etching and cleaving compared to dicing and polishing," in Proc. IEEE Group IV Photon. Conf., Hong Kong, Sep. 29-Oct. 1,2004, pp. 72-74, Paper ThP5.
25. V. Nguyen, T. Montalbo, C. Manolatou, A. Agarwal, J. Yasaitis, L. C. Kimmerling, and J. Michel, "Compact 3 dB single mode fiber-to waveguide coupler," in Proc. IEEE Group IV Photon. Conf., Antwerp, Belgium, Sep. 21-23, 2005, pp. 195-197, Paper FC4.
26. M. K. Smit and C. van Dam, "PHASAR-based WDM-devices: Principles, design and applications," IEEE J. Sel. Topics Quantum Electron., vol. 2, no. 2, pp. 236-250, Jun. 1996.
27. IEEE J. Sel. Topics Quantum Electron. (Special Issue on Arrayed Grating Routers/WDM Mux/Demuxs and Related Applications/Uses), vol. 8, no. 6, pp. 1087-1214, Jun. 1996.
28. D. J. Moss, V. G. Ta'eed, B. J. Eggleton, D. Freeman, S. Madden, M. Samoc, B. Luther-Davies, S. Janz, and D.-X. Xu, "Bragg gratings, in silicon-on-insulator waveguides by focussed ion beam milling," Appl. Phys. Lett., vol. 85, pp. 4860-4862, Nov. 2004.
29. M. R. T. Pearson, A. Bezinger, A. Delâge, J. W. Fraser, S. Janz, P. E. Jessop, and D.-X. Xu, "Arrayed waveguide grating demultiplexers in silicon-on-insulator," in Proc. SPIE, 2000, vol. 3953, pp. 11-19.
30. L. Vivien, S. Laval, B. Dumont, S. Lardenois, A. Koster, and E. Kassan, "Polarization independent single-mode rib waveguides on silicon-on-insulator for telecommunications wavelengths," Opt. Commun., vol. 210, pp. 43-49, Sep. 2002.
31. J.-J. He, E. S. Koteles, B. Lamontagne, L. Erickson, A. Delâge, and M. Davies, "Integrated polarization compensators for WDM waveguide demultiplexers," IEEE Photon. Technol. Lett., vol. 11, no. 2, pp. 224-226, Feb. 1999.
32. J.-J. He, B. Lamontagne, and E. S. Koteles, "Polarization dispersion compensated AWG demultiplexer fabricated in single shallow etching step," Electron. Lett., vol. 35, no. 9, pp. 737-738, Apr. 1999.
33. P. Cheben, A. Delage, L. Erickson, S. Janz, and D.-X. Xu, "Polarization compensation in silicon-on-insulator arrayed waveguide grating devices," in Proc. SPIE, 2001, vol. 4293, pp. 15-22.
34. D.-X. Xu, P. Cheben, D. Dalacu, A. Delage, S. Janz, B. Lamontagne, M.-J. Picard, and W. N. Ye, "Eliminating the birefringence in silicon-on-insulator ridge waveguides by use of cladding stress," Opt. Lett., vol. 29, pp. 2384-2386, Oct. 2004.
35. W. N. Ye, D.-X. Xu, S. Janz, P. Cheben, M.-J. Picard, B. Lamontagne, and N. G. Tarr, "Birefringence control using stress engineering in silicon-on-insulator waveguides," J. Lightw. Technol., vol. 23, no. 3, pp. 1308-1318, Mar. 2005.
36. M. Huang, "Stress effects on the performance of optical waveguides," Int. J. Solids Struct., vol. 40, pp. 1615-1632, 2003.
37. Y. Hida, Y. Innoue, and T. Kominato, "Elimination of PD-λ at all output ports of silica-based AWG," Electron. Lett., vol. 40, no. 18, pp. 1118-1119, Sep. 2004.
38. B. E. Little, S. T. Chu, H. A. Haus, J. Foresi, and J.-P. Laine, "Microring resonator channel dropping filters," J. Lightw. Technol., vol. 15, no. 6, pp. 998-1005, Jun. 1997.
39. T. A. Ibrahim, W. Cao, Y. Kim, J. Li, J. Goldhar, P.-T. Ho, and C. H. Lee, "Lightwave switching in semiconductor microring devices by free carrier injection," J. Lightw. Technol., vol. 21, no. 12, pp. 2997-3003, Dec. 2003.
40. C.-Y. Chao and L. J. Guo, "Biochemical sensors based on polymer microrings with sharp asymmetrical resonance," Appl. Phys. Lett., vol. 83, pp. 1527-1529, Aug. 2003.
41. A. Yariv, "Universal relations for coupling of optical power between microresonators and dielectric waveguides," Electron. Lett., vol. 36, pp. 321-322, Feb. 2000.
42. W. R. Headley, G. T. Reed, S. Howe, A. Liu, and M. Paniccia, "Polarization independent optical racetrack resonators using rib waveguides on silicon-on-insulator," Appl. Phys. Lett., vol. 85, pp. 5523-5525, 2004.
43. D.-X. Xu, S. Janz, and P. Cheben, "Design of polarization insensitive ring resonators in SOI using cladding stress engineering and MMI couplers," IEEE Photon. Technol. Lett., vol. 18, no. 2, pp. 343-345, Jan. 2006.
44. L. Soldano and E. C. M. Pennings, "Optical multi-mode interference devices based on self-imaging: Principles and applications," J. Lightw. Technol., vol. 13, no. 4, pp. 615-627, Apr. 1995.
45. M.-K. Chin, C. Xu, and W. Huang, "Theoretical approach to a polarization insensitive single-mode microring resonator," Opt. Express, vol. 12, pp. 3245-3250, Jul. 2004.
46. P. Cheben, A. Bogdanov, A. Delage, S. Janz, B. Lamonatgen, M.-J. Picard, E. Post, and D.-X. Xu, "A 100-channel near-infra-red SOI waveguide microspectrometer: Design and fabrication challenges," in Proc. SPIE, 2004, vol. 5644, pp. 103-110.
47. L. Tong, J. Lou, and E. Mazur, "Single-mode guiding properties of subwavelength-diameter silica and silicon wire waveguides," Opt. Express, vol. 12, pp. 1025-1035, Mar. 2004.
48. O. Martínez, M. L. Calvo, P. Cheben, S. Janz, J. A. Rodrigo, D.-X. Xu, and A. Delage, "Arrayed waveguide grating based on group-index modification," J. Lightw. Technol., vol. 24, no. 3, pp. 1551-1557, Mar. 2006.
49. Y. A. Vlasov, M. O'Boyle, H. F. Hamann, and S. J. McNab, "Active control of slow light on a chip with photonic crystal waveguides," Nature, vol. 438, pp. 65-69, Nov. 2005.
50. B. Schmidt, V. Almeida, C. Manolatou, S. Preble, and M. Lipson, "Nanocavity in a silicon waveguide for ultra-sensitive detection," Appl. Phys. Lett., vol. 85, pp. 4854-4856, Nov. 2004.
51. H. Kogelnik, "Theory of optical waveguides," in Guided-Wave Optoelectronics, T. Tamir, Ed., 2nd ed. Berlin, Germany: Springer-Verlag, 1990, pp. 7-87.
52. R. G. Hunsperger, Integrated Optics: Theory and Technology, 3rd ed. Berlin, Germany: Springer-Verlag, 1991.
53. G. J. Veldhuis, O. Parriaux, H. J. W. M. Hoekstra, and P. V. Lambeck, "Sensitivity enhancement in evanescent optical waveguide sensors," J. Lightw. Technol., vol. 18, no. 5, pp. 677-682, May 2000.
54. J. J. Ramsden, "Optical biosensors," J. Mol. Recognit.,vol. 10, pp. 109-120, 1997.
55. J. Homola, "Present and future of surface plasmon resonance biosensors," Anal. Bioanal. Chem., vol. 377, pp. 528-529, 2003.
56. B. J. Luff, R. D. Harris, J. S. Wilkinson, R. Wilson, and D. J. Schiffrin, "Integrated optical detection biosensor," Opt. Lett., vol. 21, pp. 618-620, Apr. 1996.
57. L. M. Lechuga, E. Mauriz, B. Sepulveda, J. Sanchez del Rio, A. Calle, G. Armelles, and C. Dominguez, "Optical biosensors as early detectors of biological and chemical warfare agents," in Frontiers in Planar Lightwave Technology, S. Janz, J. Ctyroky, and S. Tanev, Eds., Amsterdam, The Netherlands: Springer, 2005, pp. 119-140.
58. R. Voicu, R. Boukherroub, V. Bartzoka, T. Ward, J. Wojtyk, and D. D. M. Wayner, "Formation, characterization, and chemistry of undecanoic-acid terminated silicon surfaces: Patterning and immobilzation of DNA," Langmuir,vol. 20, pp. 11713-11720, 2004.
59. R. L. Espinola, T. Izuhara, M.-C. Tsai, and R. M. Osgoode, "Magneto-optical nonreciprocal phase shift in garnet/silicon-on-insulator waveguides," Opt. Lett., vol. 29, pp. 941-942, May 2004.
60. A. Liu, R. Jones, L. Liao, D. Samara-Rubio, D. Rubin, O. Cohen, R. Nicolaescu, and M. Paniccia, "A high speed silicon optical modulator based on a metal-oxide-semiconductor capacitor," Nature, vol. 427, pp. 615-618, Feb. 2004.
61. Q. Xu, B. Schmidt, S. Pradhan, and M. Lipson, "Micrometer-scale silicon electro-optic modulator," Nature, vol. 435, pp. 325-327, May 2005.
62. R. Lausten, P. Rochon, M. Ivanov, P. Cheben, S. Janz, P. Desjardins, J. Ripmeester, T. Siebert, and A. Stolow, "Optically reconfigurable azobenzene polymer-based fiber Bragg filter," Appl. Opt, vol. 44, pp. 7039-7042, 2005.
63. A. Natansohn and P. Rochon, "Photoinduced motions in azo-containing polymers," Chem. Phys., vol. 102, pp. 4139-4175, 2002.
64. A. Natansohn, P. Rochon, and E. Batalla, "Optically induced surface gratings on azaromatic polymer films," Appl. Phys. Lett., vol. 66, pp. 136-138, Jan. 1995.
65. R. Lausten, P. Rochon, M. Ivanov, P. Cheben, S. Janz, P. Desjardins, J. Ripmeester, T. Siebert, and A. Stolow, "Optically reconfigurable azobenzene polymer-based fiber Bragg filter," Appl. Opt., vol. 44, pp. 7039-7042, Nov. 2005.
66. D. Taillaert, W. Bogaerts, P. Bientsman, T. F. Krauss, P. Van Daele, I. Moerman, S. Verstuyft, K. de Mesel, and R. Baets, "An out-of-plane grating coupler for efficient butt-coupling between compact planar waveguides and optical fibers," IEEE J. Quantum Electron., vol. 38, no. 7, pp. 949-955, Jul. 2002.
67. N. C. Frateschi, P. D. Dapkus, S. S. Ou, J. J. Yang, and M. Jansen, "Low threshhold InGaAs/GaAs 45° folded cavity surface-emitting laser grown on structured substrates," IEEE Photon. Technol. Lett., vol. 5, no. 7, pp. 741-743, Jul. 1993.
68. C. P. Chao, D. Z. Garbuzov, G. J. Shiau, S. R. Forrest, A. DiMarco, and M. G. Harvey, "Low-threshold high-power, 1.3-mm wavelength, InGaAsP-InP etched-facet folded cavity surface emitting lasers," IEEE Photon. Technol. Lett., vol. 7, no. 8, pp. 836-838, Aug. 1995.
69. H. P. Lee, A. Scherrer, E. D. Beebe, W. P. Hong, R. Bhat, and M. A. Koza, "1.57 μm InGaAsP/InP surface emitting lasers by angled focus ion beam etching," Electron. Lett., vol. 28, no. 6, pp. 580-582, Mar. 1992.