Laser-assisted machining of damage-free silicon nitride parts with complex geometric features via in-process control of laser power

Journal of the American Ceramic Society

Volumn 89, Issue 11, 2006, Pages 3397-3405

  Tian, Yinggang ^a   Shin, Yung C ^a  

^a PURDUE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

LASER POWER; LASER-ASSISTED MACHINING (LAM); MATERIAL REMOVAL TEMPERATURES; THERMAL DAMAGES;

LASER BEAM EFFECTS; MICROCRACKS; MICROSTRUCTURE; PROCESS CONTROL; RESIDUAL STRESSES; SCANNING ELECTRON MICROSCOPY; X RAY DIFFRACTION ANALYSIS;

SILICON NITRIDE;

EID: 33750264344     PISSN: 00027820     EISSN: 15512916     Source Type: Journal    
DOI: 10.1111/j.1551-2916.2006.01265.x     Document Type: Article

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