A high-quality-factor film bulk acoustic resonator in liquid for biosensing applications

Journal of Microelectromechanical Systems

Volumn 20, Issue 1, 2011, Pages 213-220

  Xu, Wencheng ^a   Zhang, Xu ^a   Choi, Seokheun ^a   Chae, Junseok ^a  

^a Arizona State University   (United States)

Author keywords

Acoustic resonators; biomedical transducers; piezoelectric resonators; Q factor

Indexed keywords

ACOUSTIC WAVELENGTH; BIOMEDICAL TRANSDUCERS; BIOSENSING APPLICATIONS; CHANNEL THICKNESS; FILM BULK ACOUSTIC RESONATORS; HIGH QUALITY FACTORS; IN-SITU MONITORING; LIQUID ENVIRONMENT; MICROFLUIDIC CHANNEL; OSCILLATORY PATTERNS; PIERCE OSCILLATOR; PIEZOELECTRIC RESONATORS; Q-FACTORS; TRANSMISSION LINE MODELS; VROMAN EFFECT;

ACOUSTIC RESONATORS; ACOUSTIC TRANSDUCERS; BIOSENSORS; CRYSTAL RESONATORS; LIQUIDS; PIEZOELECTRIC TRANSDUCERS; PIEZOELECTRICITY; POWER INDUCTORS; Q FACTOR MEASUREMENT;

ACOUSTIC SURFACE WAVE FILTERS;

EID: 79551600219     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2010.2093568     Document Type: Article

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