Deposition parameters determining insulation resistance and crystallinity of parylene c in neural implant encapsulation

IFMBE Proceedings

Volumn 22, Issue , 2008, Pages 2439-2442

  Hassler, Christina ^a   Von Metzen, R ^a   Stieglitz, T ^a  

^a UNIVERSITY OF FREIBURG   (Germany)

Author keywords

Encapsulation; Flexible; Neural implant; Nonhermetic; Parylene C

Indexed keywords

CRYSTALLINITIES; DEPOSITED FILMS; DEPOSITION PARAMETERS; FLEXIBLE; INSULATION QUALITY; INSULATION RESISTANCE; LOW RESISTANCE; MICROMACHINED; NEURAL IMPLANTS; NON-HERMETIC; PARYLENE C; PROCESS PARAMETERS; SALINE SOLUTIONS; SALT INTRUSION; SUBSTRATE METALS; WHITE-LIGHT INTERFEROMETER; X RAY DIFFRACTOMETERS;

DEPOSITION; SALT WATER INTRUSION; WATER ABSORPTION;

ORGANIC POLYMERS;

EID: 69949183320     PISSN: 16800737     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1007/978-3-540-89208-3_585     Document Type: Conference Paper

References (6)

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2. Rodger D C, Fong A J, Li W et al. (2007) Flexible Parylene-Based Multielectrode Array Technology for High-Density Neural Stimulation and Recording. Sensor Actuat B-Chem 132: 449-460
3. Takeuchi S, Ziegler D, Yoshida Y et al. (2005) Parylene Flexible Neural Probes Integrated with Microfluidic Channels, Lab Chip 5: 519-523
4. Stieglitz T, Haberer W, Lau C. et al. (2004) Development of an Inductively Coupled Epiretinal Vision Prosthesis, Proc of the 26th Ann Internat Conf of the IEEE EMBS, San Francisco, CA, USA, 2004: 4178-4181
5. Stieglitz T, Kammer S, Koch K P et al. (2002) Encapsulation of Flexible Biomedical Microimplants with Parylene C, Proc 7th Ann Conf of the IFESS, Ljubljana, Slovenia, 2002: 231-233
6. th Ann Internat Conf of the IEEE EMBS, Lyon, France, 2007: 183-185