Electeodeposited metal structures in high aspect ratio cavities using vapor deposited polymer molds and laser micromachining

TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems

Volumn , Issue , 2007, Pages 513-516

  Herrault, F ^a,b   Ji, C H ^a   Rajaraman, S ^a   Shafer, R H ^a   Allen, M G ^a  

^a GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

^b INSA   (France)

Author keywords

Excimer laser micromachining; Parylene mold; Vapor deposited polymer

Indexed keywords

ABLATION; ACTUATORS; COMPOSITE MICROMECHANICS; COPPER PLATING; ELECTROCHEMISTRY; ELECTROPLATING; EXCIMER LASERS; GAS LASERS; KRYPTON; LASER ABLATION; LASERS; METALLIZING; METALS; MICROSYSTEMS; MOLDS; NONMETALS; OPTICAL DESIGN; PHOTORESISTS; POLYMERS; PRESSURE DROP; PULSED LASER DEPOSITION; SENSORS; SILICON; STRUCTURAL METALS; THREE DIMENSIONAL; TRANSDUCERS;

ABLATION PARAMETERS; EMBEDDED INDUCTORS; EXCIMER LASER MICROMACHINING; HIGH ASPECT RATIO CAVITIES; HIGH ASPECT RATIO TRENCHES; HIGH RESOLUTIONS; HIGH VOLTAGES; HIGH-DENSITY; INTERNATIONAL CONFERENCES; KRF EXCIMER LASERS; LASER MICRO-MACHINING; MEMS DEVICES; METAL LINES; METAL STRUCTURES; METALLIC STRUCTURES; PARYLENE; PARYLENE MOLD; PARYLENE-C; POLYMER MOLDS; SILICON TRENCHES; SOLID-STATE SENSORS; VAPOR DEPOSITED POLYMER;

ASPECT RATIO;

EID: 49749106367     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SENSOR.2007.4300180     Document Type: Conference Paper

References (7)

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