On the determination of energy fluxes at plasma-surface processes

Applied Physics A: Materials Science and Processing

Volumn 72, Issue 5, 2001, Pages 531-540

  Kersten, H ^a   Rohde, D ^a   Steffen, H ^a   Deutsch, H ^a   Hippler, R ^a   Swinkels, G H P M ^b   Kroesen, G M W ^b  

^a UNIVERSITY OF GREIFSWALD   (Germany)

^b EINDHOVEN UNIVERSITY OF TECHNOLOGY   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

CHARGED PARTICLES; HEAT FLUX; HEAT RADIATION; KINETIC ENERGY; POTENTIAL ENERGY; SURFACES;

ENERGY INFLUX; NEUTRALS; PLASMA SURFACE PROCESSES;

PLASMA INTERACTIONS;

EID: 0034967364     PISSN: 09478396     EISSN: None     Source Type: Journal    
DOI: 10.1007/s003390100811     Document Type: Article

References (26)