메뉴 건너뛰기




Volumn 10, Issue 2, 2011, Pages 381-388

Polymer microvalve with pre-stressed membranes for tunable flow-pressure characteristics

Author keywords

Active valve; Flow control; Microvalve

Indexed keywords

ACTIVE VALVES; CHECK VALVES; CLAMPING FORCE; ELASTIC MEMBRANES; MICRO VALVES; POLYMER-BASED VALVES; PRE-STRESSED; RECTIFYING PROPERTIES; RIGID POLYMERS;

EID: 79551490176     PISSN: 16134982     EISSN: 16134990     Source Type: Journal    
DOI: 10.1007/s10404-010-0676-2     Document Type: Article
Times cited : (9)

References (28)
  • 2
    • 0141830186 scopus 로고    scopus 로고
    • Fabrication and characterization of a micromachined passive valve
    • 10.1088/0960-1317/13/5/305
    • DCS Bien SJN Mitchell HS Gamble 2003 Fabrication and characterization of a micromachined passive valve J Micromech Microeng 13 5 557 562 10.1088/0960-1317/13/5/305
    • (2003) J Micromech Microeng , vol.13 , Issue.5 , pp. 557-562
    • Bien, D.C.S.1    Mitchell, S.J.N.2    Gamble, H.S.3
  • 3
    • 0141907969 scopus 로고    scopus 로고
    • Plastic micropump constructed with conventional techniques and materials
    • DOI 10.1016/S0924-4247(99)00192-2
    • S Bohm P Bergveld 1999 A plastic micropump constructed with conventional techniques and materials Sens Actuators A 77 3 223 228 10.1016/S0924-4247(99) 00192-2 (Pubitemid 30524266)
    • (1999) Sensors and Actuators, A: Physical , vol.77 , Issue.3 , pp. 223-228
    • Bohm, S.1    Olthuis, W.2    Bergveld, P.3
  • 4
    • 33645524142 scopus 로고    scopus 로고
    • AC electroosmotic pump with bubble-free palladium electrodes and rectifying polymer membrane valves
    • 10.1039/b509997h
    • A Brask D Snakenborg JP Kutter H Bruus 2006 AC electroosmotic pump with bubble-free palladium electrodes and rectifying polymer membrane valves Lab Chip 6 280 288 10.1039/b509997h
    • (2006) Lab Chip , vol.6 , pp. 280-288
    • Brask, A.1    Snakenborg, D.2    Kutter, J.P.3    Bruus, H.4
  • 5
    • 0029323763 scopus 로고
    • A piezoelectric-driven stereolithography-fabricated micropump
    • 10.1088/0960-1317/5/2/032
    • MC Carrozza N Croce B Magnani P Dario 1995 A piezoelectric-driven stereolithography-fabricated micropump J Micromech Microeng 5 2 177 179 10.1088/0960-1317/5/2/032
    • (1995) J Micromech Microeng , vol.5 , Issue.2 , pp. 177-179
    • Carrozza, M.C.1    Croce, N.2    Magnani, B.3    Dario, P.4
  • 6
    • 2342578816 scopus 로고    scopus 로고
    • Micropump based on PZT unimorph and one-way parylene valves
    • 10.1088/0960-1317/14/4/001
    • G-H Feng ES Kim 2004 Micropump based on PZT unimorph and one-way parylene valves J Micromech Microeng 14 4 429 435 10.1088/0960-1317/14/4/001
    • (2004) J Micromech Microeng , vol.14 , Issue.4 , pp. 429-435
    • Feng, G.-H.1    Kim, E.S.2
  • 8
    • 67349196442 scopus 로고    scopus 로고
    • Disposable thermo-pneumatic micropump for bio lab-on-a-chip application
    • Haa SM, Choa W, Ahn Y (2008) Disposable thermo-pneumatic micropump for bio lab-on-a-chip application. Microelectronic Eng 86:1337-1339
    • (2008) Microelectronic Eng , vol.86 , pp. 1337-1339
    • Haa, S.M.1    Choa, W.2    Ahn, Y.3
  • 9
    • 0036789372 scopus 로고    scopus 로고
    • High-pressure microfluidic control in lab-on-a-chip devices using mobile polymer monoliths
    • 10.1021/ac025761u
    • EF Hasselbrink Jr. TJ Shepodd JE Rehm 2002 High-pressure microfluidic control in lab-on-a-chip devices using mobile polymer monoliths Anal Chem 74 19 4913 4918 10.1021/ac025761u
    • (2002) Anal Chem , vol.74 , Issue.19 , pp. 4913-4918
    • Hasselbrink, Jr.E.F.1    Shepodd, T.J.2    Rehm, J.E.3
  • 10
    • 1642634567 scopus 로고    scopus 로고
    • A silicon-on-insulator based micro check valve
    • 10.1088/0960-1317/14/3/010
    • M Hu H Du S-F Ling Y Fu Q Chen L Chow B Li 2004 A silicon-on-insulator based micro check valve J Micromech Microeng 14 3 382 387 10.1088/0960-1317/14/ 3/010
    • (2004) J Micromech Microeng , vol.14 , Issue.3 , pp. 382-387
    • Hu, M.1    Du, H.2    Ling, S.-F.3    Fu, Y.4    Chen, Q.5    Chow, L.6    Li, B.7
  • 11
    • 0036239107 scopus 로고    scopus 로고
    • Design and fabrication of integrated passive valves and pumps for flexible polymer 3-dimensional microfluidic systems
    • DOI 10.1023/A:1014683114796
    • NL Jeon DT Chiu CJ Wargo H Wu IS Choi JR Anderson GM Whitesides 2002 Microfluidics section: design and fabrication of integrated passive valves and pumps for flexible polymer 3-dimensional microfluidic systems Biomed Microdev 4 2 117121 10.1023/A:1014683114796 (Pubitemid 34449939)
    • (2002) Biomedical Microdevices , vol.4 , Issue.2 , pp. 117-121
    • Jeon, N.L.1    Chiu, D.T.2    Wargo, C.J.3    Wu, H.4    Choi, I.S.5    Anderson, J.R.6    Whitesides, G.M.7
  • 14
    • 0344737989 scopus 로고    scopus 로고
    • Solvent Compatibility of Poly(dimethylsiloxane)-Based Microfluidic Devices
    • DOI 10.1021/ac0346712
    • JNg Lee C Park GM Whitesides 2003 Solvent compatibility of poly(dimethylsiloxane)-based microfluidic devices Anal Chem 75 23 6544 6554 10.1021/ac0346712 (Pubitemid 37493912)
    • (2003) Analytical Chemistry , vol.75 , Issue.23 , pp. 6544-6554
    • Lee, J.N.1    Park, C.2    Whitesides, G.M.3
  • 15
    • 69749112714 scopus 로고    scopus 로고
    • Development of large flow rate, robust, passive micro check valves for compact piezoelectrically actuated pumps
    • 10.1016/j.sna.2004.06.029
    • B Li Q Chen D-G Lee J Woolman GP Carman 2005 Development of large flow rate, robust, passive micro check valves for compact piezoelectrically actuated pumps Sens Actuators A 117 2 325 330 10.1016/j.sna.2004.06.029
    • (2005) Sens Actuators A , vol.117 , Issue.2 , pp. 325-330
    • Li, B.1    Chen, Q.2    Lee, D.-G.3    Woolman, J.4    Carman, G.P.5
  • 16
    • 34447105597 scopus 로고    scopus 로고
    • Single-step replicable microfluidic check valve for rectifying and sensing low Reynolds number flow
    • 10.1007/s10404-006-0127-2
    • J Loverich I Kanno H Kotera 2006 Single-step replicable microfluidic check valve for rectifying and sensing low Reynolds number flow Microfluid Nanofluid 3 4 427 435 10.1007/s10404-006-0127-2
    • (2006) Microfluid Nanofluid , vol.3 , Issue.4 , pp. 427-435
    • Loverich, J.1    Kanno, I.2    Kotera, H.3
  • 17
    • 0942300908 scopus 로고    scopus 로고
    • Micro check valves for integration into polymeric microfluidic devices
    • 10.1088/0960-1317/14/1/309
    • N-T Nguyen T-Q Truong K-K Wong S-S Ho CLN Low 2004 Micro check valves for integration into polymeric microfluidic devices J Micromech Microeng 14 1 69 75 10.1088/0960-1317/14/1/309
    • (2004) J Micromech Microeng , vol.14 , Issue.1 , pp. 69-75
    • Nguyen, N.-T.1    Truong, T.-Q.2    Wong, K.-K.3    Ho, S.-S.4    Low, C.L.N.5
  • 18
    • 58849152701 scopus 로고    scopus 로고
    • Improvement of dynamic characteristics of polydimethylsiloxane based microvalve
    • 10.1007/s00542-008-0743-8
    • G-S Ra SK Jha T-S Yoon HH Lee YS Kim 2009 Improvement of dynamic characteristics of polydimethylsiloxane based microvalve Microsyst Technol 15 607 609 10.1007/s00542-008-0743-8
    • (2009) Microsyst Technol , vol.15 , pp. 607-609
    • Ra, G.-S.1    Jha, S.K.2    Yoon, T.-S.3    Lee, H.H.4    Kim, Y.S.5
  • 19
    • 1642525680 scopus 로고    scopus 로고
    • Polymer micro valve with a hydraulic piezo-drive fabricated by the amanda process
    • 10.1016/j.sna.2003.10.056
    • T Rogge Z Rummler WK Schomburg 2004 Polymer micro valve with a hydraulic piezo-drive fabricated by the amanda process Sens Actuators A 110 1 206 212 10.1016/j.sna.2003.10.056
    • (2004) Sens Actuators A , vol.110 , Issue.1 , pp. 206-212
    • Rogge, T.1    Rummler, Z.2    Schomburg, W.K.3
  • 20
    • 0037058643 scopus 로고    scopus 로고
    • Fabrication and testing of a magnetically actuated micropump
    • DOI 10.1016/S0925-4005(02)00272-1, PII S0925400502002721
    • S Santra P Holloway CD Batich 2002 Fabrication and testing of a magnetically actuated micropump Sens Actuators B 87 2 358 364 10.1016/S0925-4005(02)00272-1 (Pubitemid 35282283)
    • (2002) Sensors and Actuators, B: Chemical , vol.87 , Issue.2 , pp. 358-364
    • Santra, S.1    Holloway, P.2    Batich, C.D.3
  • 22
    • 69549114186 scopus 로고    scopus 로고
    • Nonlinear pressure-flow relationships for passive microfluidic valves
    • 10.1039/b903960k
    • E Seker DC Leslie H Haj-Hariri JP Landers M Utz MR Begley 2009 Nonlinear pressure-flow relationships for passive microfluidic valves Lab Chip 9 2691 2697 10.1039/b903960k
    • (2009) Lab Chip , vol.9 , pp. 2691-2697
    • Seker, E.1    Leslie, D.C.2    Haj-Hariri, H.3    Landers, J.P.4    Utz, M.5    Begley, M.R.6
  • 24
    • 33746764487 scopus 로고    scopus 로고
    • The PDMS micro valve driven by PZT piezoelectric actuator on the silicon wafer. MEMS, MOEMS, and micromachining II
    • Tian L, Wang W, Liu XW, Wang XL, Bao ZhY (2006) The PDMS micro valve driven by PZT piezoelectric actuator on the silicon wafer. MEMS, MOEMS, and micromachining II. Proc SPIE 6186
    • (2006) Proc SPIE 6186
    • Tian, L.1    Wang, W.2    Liu, X.W.3    Wang, X.L.4    Zhy, B.5
  • 25
    • 2342561174 scopus 로고    scopus 로고
    • A polymeric piezoelectric micropump based on lamination technology
    • 10.1088/0960-1317/14/4/026
    • T-Q Truong N-T Nguyen 2004 A polymeric piezoelectric micropump based on lamination technology J Micromech Microeng 14 4 632 638 10.1088/0960-1317/14/4/ 026
    • (2004) J Micromech Microeng , vol.14 , Issue.4 , pp. 632-638
    • Truong, T.-Q.1    Nguyen, N.-T.2
  • 26
    • 33847296185 scopus 로고    scopus 로고
    • Planar micro-check valves exploiting large polymer compliance
    • 10.1016/j.sna.2006.07.016
    • B Yang Q Lin 2007 Planar micro-check valves exploiting large polymer compliance Sens Actuators A 134 186 193 10.1016/j.sna.2006.07.016
    • (2007) Sens Actuators A , vol.134 , pp. 186-193
    • Yang, B.1    Lin, Q.2
  • 27
    • 40749120530 scopus 로고    scopus 로고
    • Polydimethylsiloxane microfluidic system with in-channel structure for integrated electrochemical detector
    • DOI 10.1016/j.snb.2007.07.116, PII S0925400507005485
    • J-C Yooa H-J Hera CJ Kanga Y-S Kim 2008 Polydimethylsiloxane microfluidic system with in-channel structure for integrated electrochemical detector Sens Actuators B 130 1 65 69 10.1016/j.snb.2007.07.116 (Pubitemid 351380387)
    • (2008) Sensors and Actuators, B: Chemical , vol.130 , Issue.1 , pp. 65-69
    • Yoo, J.-C.1    Her, H.-J.2    Kang, C.J.3    Kim, Y.-S.4


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.