Preparation of a-C and DLC-C films using electron cyclotron resonance CVD and RF bias

Vacuum

Volumn 49, Issue 1, 1998, Pages 67-74

  Yoon, S F ^a   Yang, H ^a   Rusli, ^a   Ahn, J ^a   Zhang, Q ^a  

^a NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

CARBON; CHEMICAL VAPOR DEPOSITION; ELECTRON CYCLOTRON RESONANCE; HARDNESS; HYDROGEN; INFRARED RADIATION; LIGHT ABSORPTION; METHANE; RAMAN SPECTROSCOPY;

DIAMOND-LIKE CARBON (DLC); RADIOFREQUENCY BIAS;

AMORPHOUS FILMS;

EID: 0031628332     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/s0042-207x(97)00136-x     Document Type: Article

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