Plasma-enhanced deposition of nano-structured carbon films

Plasma Science and Technology

Volumn 7, Issue 1, 2005, Pages 2660-2664

  Yang, Qiaoqin ^a   Xiao, Chijin ^a   Hirose, A ^a  

^a UNIVERSITY OF SASKATCHEWAN   (Canada)

Author keywords

Diamond film; Graphitic carbon film; Hot filament CVD; Microwave CVD; Nanocone; Nanocrystalline; Nanotube

Indexed keywords

GRAPHITE CARBON FILMS; HOT FILAMENT CVD; MICROWAVE CVD; NANOCONES;

CATALYST ACTIVITY; CRYSTAL ORIENTATION; FILM GROWTH; GRAPHITE; MICROWAVES; NANOTUBES; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SYNTHESIS (CHEMICAL);

DIAMOND LIKE CARBON FILMS;

EID: 14544298707     PISSN: 10090630     EISSN: None     Source Type: Journal    
DOI: 10.1088/1009-0630/7/1/014     Document Type: Article

References (19)

1. Fan S, Chapline M G, Franklin N R, et al. Science, 1999, 283: 512 - 514
2. Choi G S, Cho Y S, Hong S Y, et al. J. Appl. Phys., 2002, 91: 3847 - 3854
3. Ren Z F, Huang Z P, Xu J W, et al. Science, 1998, 282: 1105 - 1107
4. Orlanducci S, Sessa V, Terranova M L, et al. Chem. Phys. Lett., 2003, 367: 109 - 115
5. Merkulov V I, Melechko A V, Guillorn M A, et al. Appl. Phys. Lett., 2002, 80: 4816 - 4818
6. Zhang G, Jiang X, Wang E. Science, 2003, 300: 472 - 474
7. Merkulov V I, Guillorn M A, Lowndes D H, et al. Appl. Phys. Lett., 2001, 79: 1178 - 1180
8. Lin C R, Wang T J, Chen K C, et al. Materials Chemistry and Physics, 2001, 72: 126 - 129
9. Jan Y T, Hsieh H C, Chen C F. Diamond Relat. Mater., 1999, 8: 772 - 780
10. Zhang W J, Meng X M, Chan C Y, et al. Applied Physics Letters, 2003, 82: 2622 - 2624
11. Chow L, Wang H, Kleckley S, et al. Solid State Communications, 1995, 93: 999 - 1002
12. Regel L L, Wilcox W R. J. Mater. Sci. Lett., 1999, 18: 427 - 430
13. Regel L L, Wilcox W R. J. Mater. Sci. Lett., 2000, 19: 455 - 457
14. Shin S D, Hwang N M, Kim D Y. Diamond Relat. Mater., 2002, 11: 1337 - 1343
15. Yang Q, Xiao C, Chen W, et al. Diamond Relat. Mater., 2003, 12: 1482 - 1487
16. Yang Q, Xiao C, Chen W, Hirose A. Diamond Relat. Mater., 2004, 13: 433 - 437
17. Yang Q, Xiao C, Sammynaiken R, et al. Carbon (in press)
18. Yang Q, Xiao C, Hirose A. et al. Diamond Relat. Mater., (submitted)
19. Chen W, Xiao C, Yang Q, et al. Canadian Journal of Physics (in press)