Growth conditions and mechanical properties of a-C:H films

Zhenkong Kexue yu Jishu Xuebao/Journal of Vacuum Science and Technology

Volumn 28, Issue 1, 2008, Pages 64-66

  Li, Ming ^a   Wang, Feng ^a   Zhang, Yan ^a   Lin, Zeng ^a   Ba, Dechun ^a  

^a NORTHEASTERN UNIVERSITY   (China)

Author keywords

Frictional wear; Hardness; Hydrogenated amorphous carbon film; RF PECVD; Transition interlayer

Indexed keywords

AMORPHOUS CARBON; FILM GROWTH; FRICTION; HYDROGENATION; MECHANICAL PROPERTIES; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; STAINLESS STEEL; SUBSTRATES; WEAR RESISTANCE; X RAY PHOTOELECTRON SPECTROSCOPY;

ARGON PRESSURE; FRICTIONAL WEAR; HYDROGEN PARTIAL PRESSURE; HYDROGENATED AMORPHOUS CARBON FILM; RADIO FREQUENCY PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION (RF-PECVD); RAMEN SPECTROSCOPY; STAINLESS STEEL SUBSTRATES; TRANSITION INTERLAYER;

CARBON FILMS;

EID: 40749101098     PISSN: 16727126     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (9)

1. Smietana M, Szmidt J, Duded M, et al. Diamond and Related Materials, 2004, 13 (4-8): 954-957
2. Casiraghi C, Ferrari A C, Ohr R, et al. Diamond and Related Materials, 2004, 13 (4-8): 1416-1421
3. Cheng Y H, Wu Y P. Chinese Ceramic Society, 1998, 26 (4): 508-512
4. Li Hongxuan, Xu Tao, Wang Chengbing, et al. Applied Surface Science, 2005, 249 (1-4): 257-265
5. Liu Y, ERDEMIR A, MELETIS E I. Surface and Coatings Technology, 1997, 94 (95): 463-468
6. Ali Erdemir. Tribology international, 2004, 37 (11-12): 1005-1012
7. Erdemir, Eryilmaz O L, Nilufer I B, et al. Surface and Coatings Technology, 2000, (134): 448-454