Standard-free composition measurements of Alx In1-xN by low-loss electron energy loss spectroscopy

Physica Status Solidi - Rapid Research Letters

Volumn 5, Issue 2, 2011, Pages 50-52

  Palisaitis, Justinas ^a   Hsiao, Ching Lien ^a   Junaid, Muhammad ^a   Xie, Mengyao ^a   Darakchieva, Vanya ^a   Carlin, Jean Francois ^b   Grandjean, Nicolas ^b   Birch, Jens ^a   Hultman, Lars ^a   Persson, Per O Å ^a  

^a LINKÖPING UNIVERSITY   (Sweden)

^b EPFL   (Switzerland)

Author keywords

AlInN; Compositional analysis; Low loss EELS; Thin films

Indexed keywords

ALINN; ALN; COMPOSITION MEASUREMENTS; COMPOSITIONAL ANALYSIS; COMPOSITIONAL INFORMATION; LATTICE PARAMETERS; LINEAR RELATION; LOW LOSS; MAGNETRON SPUTTER EPITAXY; METAL-ORGANIC VAPOR PHASE EPITAXY; PLASMON ENERGY; SCANNING TRANSMISSION ELECTRON MICROSCOPES;

ALLOYING ELEMENTS; DISSOCIATION; ELECTRON EMISSION; ELECTRON ENERGY LEVELS; ELECTRON SCATTERING; ENERGY DISSIPATION; EPITAXIAL GROWTH; LATTICE CONSTANTS; MAGNETRONS; METALLORGANIC VAPOR PHASE EPITAXY; NUCLEAR INSTRUMENTATION; ORGANOMETALLICS; RUTHERFORD BACKSCATTERING SPECTROSCOPY; SPECTRUM ANALYSIS; THIN FILMS; TRANSMISSION ELECTRON MICROSCOPY; X RAY DIFFRACTION;

ELECTRON ENERGY LOSS SPECTROSCOPY;

EID: 79251537771     PISSN: 18626254     EISSN: 18626270     Source Type: Journal    
DOI: 10.1002/pssr.201004407     Document Type: Letter

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