Optimizing and quantifying dopant mapping using a scanning electron microscope with a through-the-lens detector

Applied Physics Letters

Volumn 83, Issue 2, 2003, Pages 293-295

  Schonjahn C ^a   Broom, R F ^a   Humphreys, C J ^a   Howie, A ^b   Mentink, S A M ^c  

^a UNIVERSITY OF CAMBRIDGE   (United Kingdom)

^b UNIVERSITY OF CAMBRIDGE   (United Kingdom)

^c PHILIPS RESEARCH LABORATORIES   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRON EMISSION; LENSES; OPTIMIZATION; SCANNING ELECTRON MICROSCOPY; SEMICONDUCTOR DOPING;

DOPANT MAPPING;

SEMICONDUCTOR JUNCTIONS;

EID: 18244417103     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1592302     Document Type: Article

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