The helium ion microscope: The next stage in nanoscale imaging

American Laboratory

Volumn 40, Issue 20, 2008, Pages 42-46

  Ananth, Mohan ^a,b,c   Scipioni, Larry ^a   Notte, John ^a  

^a ORION Product Management ^*  (United States)

^b Applications Research

^c Carl Zeiss Vision Inc USA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC NUMBERS; BACK-SCATTERED; EDGE DEFINITIONS; GOLD PARTICLES; HELIUM IONS; HIGH BRIGHTNESS; IMAGE INFORMATIONS; IMAGING APPLICATIONS; IMAGING MODES; NANO-SCALE IMAGING; PROBE SIZES; SUBMICRON RESOLUTIONS; SUBNANOMETER; SURFACE DETAILS;

ATOMS; BACKSCATTERING; HELIUM; HYDROGEN; ION MICROSCOPES; ION SOURCES; RADIOACTIVITY;

IONS;

EID: 64249136210     PISSN: 00447749     EISSN: None     Source Type: Trade Journal    
DOI: None     Document Type: Article

References (5)

1. Müller, E.W. Z. Physik. 1951, 131, 136- 42.
2. Tondare, V.N. J. Vac. Sci. Technol. A 2005, 23(6), 1498-1508.
3. Ward, B.; Notte, J.; Economou, N. J. Vac. Sci. Technol. B 2006, 24(6), 2871-4.
4. Morgan, J.; Notte, J.; Hill, R.; Ward, B. Microscopy Today 2006, 14(4), 24-8.
5. Joy, D.C.; Griffin, B.; Notte, J.; Stern, L.; McVey, S.; Fenner, C. SPIE Proceedings: Metrology, Inspection, and Process Control for Microlithography XXIv 2007, 6518.