Intelligent control of piezoelectric micropump based on MEMS flow sensor

IEEE/RSJ 2010 International Conference on Intelligent Robots and Systems, IROS 2010 - Conference Proceedings

Volumn , Issue , 2010, Pages 3055-3060

  Chen, Liguo ^a   Liu, Yaxin ^b   Sun, Lining ^b   Qu, Dongsheng ^b   Min, Jijiang ^c  

^a SOOCHOW UNIVERSITY   (China)

^b HARBIN INSTITUTE OF TECHNOLOGY   (China)

^c Changzhou Mingseal Robotic Technology Co Ltd   (China)

Author keywords

[No Author keywords available]

Indexed keywords

CLOSED-LOOP; CLOSED-LOOP CONTROL; DOSING SYSTEMS; DRIVING VOLTAGES; DRUG DELIVERY SYSTEM; FLOW-SENSORS; FUZZY-PID; LIQUID VOLUME; MEMS (MICROELECTROMECHANICAL SYSTEM); PIEZOELECTRIC MICROPUMPS; PROPORTIONAL-INTEGRAL; PZT; RESEARCH FIELDS; SELF ADJUST; SENSOR INFORMATIONS;

COMPOSITE MICROMECHANICS; DRUG DELIVERY; LIQUIDS; MEDICAL APPLICATIONS; MEMS; MICROELECTROMECHANICAL DEVICES; PIEZOELECTRICITY; PROPORTIONAL CONTROL SYSTEMS; PUMPS; SENSORS; TRANSDUCERS;

INTELLIGENT ROBOTS;

EID: 78651515632     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/IROS.2010.5649844     Document Type: Conference Paper

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