Fabrication of TiNi shape memory actuator for micropump

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3891, Issue , 1999, Pages 328-335

  Makino, Eiji ^a   Mitsuya, Takashi ^a   Shibata, Takayuki ^a  

^a HOKKAIDO UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; PUMPS; SHAPE MEMORY EFFECT; TITANIUM NITRIDE;

MICROPUMP;

MICROELECTROMECHANICAL DEVICES;

EID: 0033335921     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (16)