Heterogeneous and homogeneous nucleation of epitaxial NiSi2 in [110] Si nanowires

Journal of Physical Chemistry C

Volumn 115, Issue 2, 2011, Pages 397-401

  Chou, Yi Chia ^a   Wu, Wen Wei ^b   Lee, Chung Yang ^c   Liu, Chun Yi ^c   Chen, Lih Juann ^c   Tu, King Ning ^c  

^a UNIVERSITY OF CALIFORNIA   (United States)

^b NATIONAL CHIAO TUNG UNIVERSITY   (Taiwan)

^c NATIONAL TSING HUA UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

[110] DIRECTION; EPITAXIAL SILICIDES; HETEROGENEOUS NUCLEATION; HIGH RESOLUTION; HOMOGENEOUS NUCLEATION; IN-SITU OBSERVATIONS; INCUBATION TIME; KINETIC ANALYSIS; LATTICE MATCH; SI NANOWIRE; STEP FORMATION; TEM; TEM OBSERVATIONS;

EPITAXIAL GROWTH; HIGH RESOLUTION TRANSMISSION ELECTRON MICROSCOPY; NANOWIRES; SILICIDES; SILICON;

NUCLEATION;

EID: 78651465924     PISSN: 19327447     EISSN: 19327455     Source Type: Journal    
DOI: 10.1021/jp108686y     Document Type: Article

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