On the development of the morphology of ultrananocrystalline diamond films

Physica Status Solidi (A) Applications and Materials Science

Volumn 208, Issue 1, 2011, Pages 70-80

  Kulisch, Wilhelm ^a   Popov, Cyril ^a   Sasaki, Takao ^b   Sirghi, Lucel ^c   Rauscher, Hubert ^b   Rossi, Francois ^b   Reithmaier, Johann Peter ^a  

^a UNIVERSITY OF KASSEL   (Germany)

^b JOINT RESEARCH CENTRE   (Italy)

^c ALEXANDRU IOAN CUZA UNIVERSITY OF IASI   (Romania)

Author keywords

growth; morphology; nanocrystalline diamond; nucleation; surface roughness; thin films

Indexed keywords

CONTINUOUS FILMS; DEPOSITION TIME; GROWTH; NANOCRYSTALLINE DIAMOND FILMS; NANOCRYSTALLINE DIAMONDS; NUCLEAR REACTION ANALYSIS; NUCLEATION DENSITIES; NUCLEATION SITES; PRE-TREATMENT; RMS ROUGHNESS; SECONDARY NUCLEATION; SEM; ULTRANANOCRYSTALLINE DIAMOND FILMS; ULTRANANOCRYSTALLINE DIAMONDS;

ATOMIC FORCE MICROSCOPY; ATOMIC SPECTROSCOPY; COALESCENCE; DEPOSITION; DIAMONDS; FILM GROWTH; FOURIER TRANSFORM INFRARED SPECTROSCOPY; FOURIER TRANSFORMS; MORPHOLOGY; NUCLEATION; SCANNING ELECTRON MICROSCOPY; SURFACE PROPERTIES; SURFACE ROUGHNESS; THIN FILMS; VAPOR DEPOSITION;

DIAMOND FILMS;

EID: 78651351516     PISSN: 18626300     EISSN: 18626319     Source Type: Journal    
DOI: 10.1002/pssa.201026066     Document Type: Article

References (46)

1. D. M. Gruen, Annu. Rev. Mater. Sci. 29, 211 (1999).
2. W. Kulisch, and, C. Popov, Phys. Status Solidi A 203, 203 (2006), Feature Article.
3. K. E. Spear, and, J. P. Dismukes, (eds.), Synthetic Diamond: Emerging CVD Science and Technology (John Wiley & Sons, New York, 1999).
4. W. Kulisch, Deposition of Superhard Diamond-Like Materials (Springer Tracts on Modern Physics, Heidelberg, Berlin, 1999).
5. P. Koidl, and, C. P. Klages, Diamond Relat. Mater. 1, 1065 (1992).
6. X. Jiang, and, C. P. Klages, Phys. Status Solidi A 154, 175 (1996).
7. D. M. Gruen, Mater. Res. Soc. Bull. 26, 771 (2001).
8. J. A. Carlisle, and, O. Auciello, Electrochem. Soc. Interface 12 (1), 28 (2003).
9. M. D. Ford, and, Y. K. Vohra, J. Phys. D 35, L105 (2002).
10. J. Butler, Electrochem. Soc. Interface 12 (1), 22 (2003).
11. O. A. Williams, M. Daenen, J. D'Haen, K. Haenen, J. Maes, V. V. Moshchalkov, M. Nesladek, and, D. M. Gruen, Diamond Relat. Mater. 15, 654 (2006).
12. S. Takeuchi, S. Oda, and, M. Murakawa, Thin Solid Films 388/389, 238 (2001).
13. X. Jiang, and, C. J. Lia, Appl. Phys. Lett. 80, 2269 (2002).
14. D. Zhou, T. G. McCauley, L. C. Qin, A. R. Krauss, and, D. M. Gruen, J. Appl. Phys. 83, 540 (1998).
15. Y. Liu, C. Liu, Y. Chen, Y. Tzeng, P. Tso, and, I. Lin, Diamond Relat. Mater. 13, 671 (2004).
16. W. B. Yang, X. F. Lü, and, Z. X. Cao, J. Appl. Phys. 91, 10068 (2002).
17. M. S. Kang, W. S. Lee, and, Y. J. Baik, Thin Solid Films 398/399, 175 (2001).
18. W. Tang, C. Zhu, W. Yao, Q. Wang, C. Li, and, F. Lu, Thin Solid Films 429, 63 (2003).
19. V. V. Konovalov, A. Melo, S. A. Catledge, S. Chowdhury, and, Y. K. Vohra, J. Nanosci. Nanotechnol. 6, 258 (2006).
20. N. N. Naguib, J. W. Elam, J. Birrell, J. Wang, D. S. Grierson, B. Kabius, J. M. Hiller, A. V. Sumant, R. W. Carpick, O. Auciello, and, J. A. Carlisle, Chem. Phys. Lett. 430, 345 (2006).
21. S. Chowdhury, D. A. Hillman, S. A. Catledge, V. V. Konovalov, and, Y. K. Vohra, J. Mater. Res. 21, 2675 (2006).
22. C. Popov, and, W. Kulisch, Investigation of nanocrystalline diamond films prepared by microwave plasma chemical vapor deposition, in: Proceedings of the CVD XVI and EUROCVD-14 Conference (The Electrochemical Society, Pennington, NJ, 2003), p. 1079.
23. C. Popov, M. Novotny, M. Jelinek, S. Boycheva, V. Vorlicek, M. Trchova, and, W. Kulisch, Thin Solid Films 506/507, 297, (2006).
24. R. Freudenstein, and, W. Kulisch, Thin Solid Films 420/421, 132 (2002).
25. W. Lanford, J. Tesmer, and, M. Nastasi, (eds.), Handbook of Modern Ion Beam Materials Analysis (Materials Research Society, Pittsburg, PA, 1995).
26. C. Popov, W. Kulisch, P. N. Gibson, G. Ceccone, and, M. Jelinek, Diamond Relat. Mater. 13, 1371 (2004).
27. C. Popov, W. Kulisch, S. Boycheva, K. Yamamoto, G. Ceccone, and, Y. Koga, Diamond Relat. Mater. 13, 2071 (2004).
28. P. E. Pehrsson, F. G. Celii, and, J. E. Butler, Chemical mechanisms of diamond CVD, in: Diamond Films and Coatings (Noyes, Park Rigde, NJ, 1993), chap. 4.
29. S. Boycheva, C. Popov, J. Bulir, A. Piegari, and, W. Kulisch, Fullerenes, Nanotubes, Carbon Nanostruct. 13(S1), 457 (2005).
30. W. Kulisch, C. Popov, V. Vorlicek, P. N. Gibson, and, G. Favaro, Thin Solid Films 515, 1005 (2006).
31. W. Kulisch, T. Sasaki, F. Rossi, C. Popov, C. Sippel, and, D. Grambole, Phys. Status Solidi (RRL) 2, 74 (2008).
32. B. Dischler, A. Bubenzer, and, P. Koidl, Solid State Commun. 48, 105 (1983).
33. H. Günzler, and, H. Böck, IR-Spektroskopie (Verlag Chemie, Weinheim, 1983).
34. C. J. Tang, A. J. Neves, and, M. C. Carmo, Appl. Phys. Lett. 86, 223107 (2005).
35. W. Kulisch, C. Popov, S. Boycheva, M. Jelinek, P. N. Gibson, and, V. Vorlicek, Surf. Coat. Technol. 200, 4731 (2006).
36. S. Michaelson, O. Ternyak, A. Hoffman, O. E. Williams, and, D. M. Gruen, Appl. Phys. Lett. 91, 103104 (2007).
37. S. Michaelson, O. Ternyak, R. Akhvlediani, O. E. Williams, D. M. Gruen, and, A. Hoffman, Phys. Status Solidi A 204, 2860 (2007).
38. C. Z. Gu, and, X. Jiang, J. Appl. Phys. 88, 1788 (2000).
39. K. M. McNamara, K. K. Gleason, and, C. J. Robinson, J. Vac. Sci. Technol. A 10, 3143 (1992).
40. B. Lux, R. Haubner, H. Holzer, and, R. C. de Vries, Int. J. Refract. Met. Hard Mater. 15, 263 (1997).
41. A. Hogmark, P. Hollman, A. Alahelisten, and, P. Hedenquist, Wear 200, 225 (1996).
42. S. A. Catledge, M. D. Fries, Y. K. Vohra, W. R. Lacefield, J. E. Lemons, S. Woodard, and, R. Venugopalan, J. Nanosci. Nanotechnol. 2, 1 (2002).
43. A. V. Sumant, D. S. Grierson, J. E. Gerbi, J. Birrell, U. D. Lanke, O. Auciello, J. A. Carlisle, and, R. W. Carpick, Adv. Mater. 17, 1039 (2005).
44. A. van der Drift, Philips Res. Rep. 22, 267 (1967).
45. H. Sternschulte, H. E. Rabl, D. Steinmüller-Nethl, and, B. Tilg, Chem. Vap. Deposition 14, 232 (2008).
46. H. Sternschulte, H. E. Rabi, D. Steinmüller-Nethl, and, U. Stimming, paper presented at the 19th European Conference on Diamond and Related Materials, Sitges, Spain, September (Poster P1.3.24) 2008.