Chemical bonding study of nanocrystalline diamond films prepared by plasma techniques

Thin Solid Films

Volumn 506-507, Issue , 2006, Pages 297-302

  Popov, C ^a   Novotny, M ^b   Jelinek, M ^b   Boycheva, S ^a   Vorlicek, V ^b   Trchova, M ^c   Kulisch, W ^a  

^a UNIVERSITY OF KASSEL   (Germany)

^b INSTITUTE OF PHYSICS   (Czech Republic)

^c INSTITUTE OF MACROMOLECULAR CHEMISTRY   (Czech Republic)

Author keywords

Bonding structure; Hybrid pulsed laser deposition; Microwave plasma chemical vapor deposition; Nanocrystalline diamond

Indexed keywords

AMORPHOUS ALLOYS; FILMS; MICROWAVE POWER TRANSMISSION; NANOSTRUCTURED MATERIALS; PLASMAS; PRESSURE; RAMAN SCATTERING;

HYBRID PULSED LASER DEPOSITION(HPLD).; MICROWAVE PLASMA CHEMICAL VAPOR DEPOSITION; MICROWAVE PLASMA CHEMICAL VAPOR DEPOSITION (MWCVD); NANOCRYSTALLINE DIAMOND; NANOCRYSTALLINE DIAMOND/AMORPHOUS CARBON (NCD/A-C);

BONDING;

EID: 33645211035     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2005.08.109     Document Type: Conference Paper

References (27)

1. C. Zuiker, A.R. Krauss, D.M. Gruen, X. Pan, J.C. Li, R. Csencsits, A. Erdemir, C. Bindal, and G. Fenske Thin Solid Films 270 1995 154
2. D.M. Gruen, A.R. Krauss, D. Zhou, T.G. McCauley, T.D. Corrigan, R.P.H. Chang, and G.M. Swain The Electrochemical Society Proceedings 97-25 1997 The Electrochemical Society Pennington, NJ 325
3. M. Hiramatsu, C.H. Lau, A. Bennett, and J.S. Foord Thin Solid Films 407 2002 18
4. S.S. Profit, S.J. Probert, M.D. Whitfield, J.S. Foord, and R.B. Jackman J. Vac. Sci. Technol., B 17 1999 719
5. D.M. Gruen Annu. Rev. Mater. Sci. 29 1999 211
6. T.G. McCauley, D.M. Gruen, and A.R. Krauss Appl. Phys. Lett. 73 1998 1646
7. S.A. Catlegde, and Y.K. Vohra J. Appl. Phys. 84 1998 6469
8. T. Lin, G.Y. Yu, A.T.S. Wee, Y.X. Shen, and K.P. Loh Appl. Phys. Lett. 77 2000 2692
9. S. Takeuchi, S. Oda, and M. Murakawa Thin Solid Films 388/389 2001 238
10. Z.Y. Chen, J.P. Zhao, T. Yano, T. Ooie, M. Yoneda, and J. Sakakibara J. Cryst. Growth 226 2001 62
11. T. Yoshitake, T. Nishiyama, T. Hara, and K. Nagayama Appl. Surf. Sci. 197-198 2002 352
12. S.N. Kundu, M. Basu, A.B. Maity, S. Chaudhuri, and A.K. Pal Mater. Lett. 31 1997 303
13. G.A.J. Amaratunga, S.R.P. Silva, and D.R. McKenzie J. Appl. Phys. 70 1991 5374
14. K. Okada, K. Kanda, S. Komatsu, and S. Matsumoto J. Appl. Phys. 88 2000 1674
15. R.J. Nemanich, J.T. Glass, G. Lucovsky, and R.E. Shroder J. Vac. Sci. Technol., A 6 1988 1783
16. S. Prawer, K.W. Nugent, D.N. Jamieson, J.O. Orwa, L.A. Bursill, and J.L. Peng Chem. Phys. Lett. 332 2000 93
17. P.K. Bachmann, and D.U. Wiechert Diamond Relat. Mater. 1 1992 422
18. A.C. Ferrari, and J. Robertson Phys. Rev., B 63 2001 121405
19. R. Pfeiffer, H. Kuzmany, N. Salk, and B. Günther Appl. Phys. Lett. 82 2003 4149
20. C. Popov, and W. Kulisch M. Allendorf F. Maury F. Teyssandier Proceedings of the CVD XVI and EUROCVD-14 Conference 2003 The Electrochemical Society Pennington, N.J. 1079
21. C. Popov, W. Kulisch, P.N. Gibson, G. Ceccone, and M. Jelinek Diamond Relat. Mater. 13 2004 1371
22. N. Wada, P.J. Gaczi, and S.A. Solin J. Non-Cryst. Solids 35/36 1980 543
23. S.R. Sails, D.J. Gardiner, M. Bowden, J. Savage, and D. Rodway Diamond Relat. Mater. 5 1996 589
24. A.C. Ferrari, and J. Robertson Phys. Rev., B 61 2000 14095
25. B. Dischler, A. Bubenzer, and P. Koidl Solid State Commun. 48 1983 105
26. J. Walker Rep. Prog. Phys. 42 1979 1605
27. G.S. Woods Proc. R. L., A 407 1986 219