Synthesis of multilayer diamond film and evaluation of its mechanical properties

Thin Solid Films

Volumn 398, Issue 399, 2001, Pages 238-243

  Takeuchi, Sadao ^a   Oda, Sumitsugu ^a   Murakawa, Masao ^a  

^a NIPPON INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

Bias treatment; Diamond film; Mechanical properties; Multilayer

Indexed keywords

BENDING STRENGTH; BRITTLE FRACTURE; CHEMICAL VAPOR DEPOSITION; CRACK PROPAGATION; CRYSTAL GROWTH; GRAIN GROWTH; INTERFACES (MATERIALS); MULTILAYERS; SUBSTRATES; SYNTHESIS (CHEMICAL); TOUGHNESS; WEAR RESISTANCE;

BIAS TREATMENT;

DIAMOND FILMS;

EID: 0035505751     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(01)01499-7     Document Type: Article

References (6)