Measurement of hydrogen radical density and its impact on reduction of copper oxide in atmospheric-pressure remote plasma using H2 and Ar mixture gases

Applied Physics Express

Volumn 3, Issue 12, 2010, Pages

  Inui, Hirotoshi ^a   Takeda, Keigo ^a   Kondo, Hiroki ^a   Ishikawa, Kenji ^a   Sekine, Makoto ^a   Kano, Hiroyuki ^a,b   Yoshida, Naofumi ^a,c   Hori, Masaru ^a  

^a NAGOYA UNIVERSITY   (Japan)

^b NU Eco Engineering Co Ltd   (Japan)

^c Fuji Machine Mfg Co Ltd   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ALTERNATING CURRENT; ATMOSPHERIC PRESSURE PLASMAS; ELECTRON DENSITIES; GAS TEMPERATURE; HYDROGEN RADICAL; MICRO HOLLOW; RADICAL DENSITIES; RADICAL FLUXES; REMOTE PLASMAS; ROOM TEMPERATURE; VACUUM ULTRAVIOLET ABSORPTION SPECTROSCOPIES;

ABSORPTION SPECTROSCOPY; COPPER; COPPER OXIDES; HYDROGEN; PLASMAS; REDUCTION;

DENSITY OF GASES;

EID: 78650907958     PISSN: 18820778     EISSN: 18820786     Source Type: Journal    
DOI: 10.1143/APEX.3.126101     Document Type: Article

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