Micro-aspiration assisted lithography

Microelectronic Engineering

Volumn 84, Issue 5-8, 2007, Pages 864-867

  Le Berre, M ^a   Shi, J ^a   Crozatier, C ^a   Velve Casquillas, G ^b   Chen, Y ^a,b  

^a ECOLE NORMALE SUPÉRIEURE   (France)

^b CNRS   (France)

Author keywords

Aspiration; Capillary lithography; Microfluidics; Moulding

Indexed keywords

MICROFLUIDICS; NANOPARTICLES; PATTERN RECOGNITION; SUBSTRATES;

ASPIRATION FORCES; MICRO-ASPIRATION; MOULD CAVITIES; RESIST LAYER SPIN COATED;

NANOIMPRINT LITHOGRAPHY;

LITHOGRAPHY; MOLDING;

EID: 34247617297     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2007.01.130     Document Type: Article

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