Influence of the molecular weight and imprint conditions on the formation of capillary bridges in nanoimprint lithography

Nanotechnology

Volumn 17, Issue 16, 2006, Pages 4082-4087

  Chaix, N ^a   Gourgon, C ^a   Landis, S ^a   Perret, C ^a   Fink, M ^b   Reuther, F ^b   Mecerreyes, D ^c  

^a CEA LETI   (France)

^b MICRO RESIST TECHNOLOGY GMBH   (Germany)

^c Centro de Investigacion Tecnologica En Electroquimica   (Spain)

Author keywords

[No Author keywords available]

Indexed keywords

CAPILLARY TUBES; DEFORMATION; LITHOGRAPHY; MICROSTRUCTURE; MOLECULAR WEIGHT; THERMAL EFFECTS; THICK FILMS; VISCOSITY;

CAPILLARY BRIDGES; FEATURE DENSITY; NANOIMPRINT LITHOGRAPHY; PRINTED POLYMERS;

NANOTECHNOLOGY;

EID: 33748889191     PISSN: 09574484     EISSN: 13616528     Source Type: Journal    
DOI: 10.1088/0957-4484/17/16/015     Document Type: Article

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