Formation of 2D photonic crystal bars by simultaneous photoelectrochemical etching of trenches and macropores in silicon

Semiconductors

Volumn 44, Issue 12, 2010, Pages 1617-1623

  Astrova, E V ^a   Fedulova, G V ^a   Guschina, E V ^a  

^a IOFFE INSTITUTE   (Russian Federation)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 78650672555     PISSN: 10637826     EISSN: None     Source Type: Journal    
DOI: 10.1134/S1063782610120158     Document Type: Article

References (18)

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