A simple humidity sensor with thin film porous alumina and integrated heating

Procedia Engineering

Volumn 5, Issue , 2010, Pages 701-704

  Juhász, László ^a   Mizsei, János ^a  

^a BUDAPEST UNIVERSITY OF TECHNOLOGY AND ECONOMICS   (Hungary)

Author keywords

Humidity sensor; Integrated heating; Porous alumina

Indexed keywords

ALUMINA; ALUMINUM; ALUMINUM COATINGS; ANODIC OXIDATION; DIGITAL STORAGE; ELECTROCHEMICAL OXIDATION; HEATING; HUMIDITY SENSORS; SEMICONDUCTOR JUNCTIONS; THIN FILMS;

ANODIC ALUMINUM OXIDE; AVERAGE SENSITIVITIES; CAPACITIVE STRUCTURE; POROUS ALUMINA; SEMICONDUCTOR PROCESSING; SENSOR STRUCTURES; TEMPERATURE MEASURING; THIN FILM ALUMINUM;

CAPACITIVE SENSORS;

EID: 78650619142     PISSN: None     EISSN: 18777058     Source Type: Conference Proceeding    
DOI: 10.1016/j.proeng.2010.09.206     Document Type: Conference Paper

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