Porous alumina based capacitive MEMS RH sensor

DTIP of MEMS and MOEMS - Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS

Volumn , Issue , 2008, Pages 381-385

  Juhász, László ^a   András, Vass Várnai ^a   Veronika, Timár Horváth ^a   Desmulliez, Marc P Y ^b   Dhariwal, Resh S ^b  

^a BUDAPEST UNIVERSITY OF TECHNOLOGY AND ECONOMICS   (Hungary)

^b HERIOT WATT UNIVERSITY   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

ARTS COMPUTING; ATMOSPHERIC HUMIDITY; FILM PREPARATION; HUMIDITY CONTROL; MEMS; MICROELECTROMECHANICAL DEVICES; SENSORS;

ALTERNATIVE METHODS; CAPACITIVE STRUCTURES; CAPACITIVE TYPES; CMOS-MEMS; ELEVATED TEMPERATURES; JOINT RESEARCH AND DEVELOPMENT; LOW-POWER; POROUS ALUMINAS; POST-CMOS; RELATIVE HUMIDITY SENSORS; RESISTIVE HEATING; RH SENSORS; SENSING LAYERS; TEMPERATURE DEPENDENCES;

WIRELESS SENSOR NETWORKS;

EID: 62249183761     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/DTIP.2008.4753024     Document Type: Conference Paper

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