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Volumn 492, Issue 1-2, 2005, Pages 66-70

Anodizing process of Al films on Si substrates for forming alumina templates with short-distance ordered 25 nm nanopores

(6) Mei, Y F a Wu, X L a Qiu, T a Shao, X F a Siu, G G b Chu, Paul K b

a NANJING UNIVERSITY (China)

b CITY UNIVERSITY OF HONG KONG (Hong Kong)

Author keywords

Aluminum oxide; Electrochemistry; Structural properties

Indexed keywords

ALUMINA; ANODIC OXIDATION; ELECTRIC POTENTIAL; ELECTROCHEMISTRY; GROWTH (MATERIALS); INFRARED RADIATION; LIGHT TRANSMISSION; NANOSTRUCTURED MATERIALS; OPTOELECTRONIC DEVICES; PARAMETER ESTIMATION; SILICON;

ALUMINUM OXIDE; NANOPORES; STRUCTURAL PROPERTIES; TEMPLATES;

ALUMINUM;

EID: 25644433367 PISSN: 00406090 EISSN: None Source Type: Journal
DOI: 10.1016/j.tsf.2005.06.044 Document Type: Article

Times cited : (11)

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