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Volumn 5, Issue , 2010, Pages 1380-1383

Liquid RF MEMS variable inductor

Author keywords

[No Author keywords available]

Indexed keywords

CIRCUIT OSCILLATIONS; ELECTRIC NETWORK PARAMETERS; INDUCTANCE; LIQUIDS; OSCILLATORS (ELECTRONIC); OSCILLISTORS; VARIABLE FREQUENCY OSCILLATORS;

EID: 78650610648     PISSN: None     EISSN: 18777058     Source Type: Conference Proceeding    
DOI: 10.1016/j.proeng.2010.09.372     Document Type: Conference Paper
Times cited : (11)

References (13)
  • 4
    • 0033099111 scopus 로고    scopus 로고
    • A monolithic variable inductor network using microrelays with combined thermal and electrostatic actuation
    • Zhou S, Sun X-Q and Carr W N 1999 A monolithic variable inductor network using microrelays with combined thermal and electrostatic actuation J. Micromech. Microeng. 9 45-50
    • (1999) J. Micromech. Microeng. , vol.9 , pp. 45-50
    • Zhou, S.1    Sun, X.-Q.2    Carr, W.N.3
  • 10
    • 33750525802 scopus 로고    scopus 로고
    • A Tunable RF MEMS Inductor on Silicon Incorporating an Amorphous Silicon Bimorph in a Low-Temperature Process
    • NOVEMBER
    • Stella Chang, and Siva Sivoththaman"A Tunable RF MEMS Inductor on Silicon Incorporating an Amorphous Silicon Bimorph in a Low-Temperature Process". IEEE ELECTRON DEVICE LETTERS, VOL. 27, NO. 11, NOVEMBER 2006
    • (2006) IEEE Electron Device Letters , vol.27 , Issue.11
    • Chang, S.1    Sivoththaman, S.2
  • 11
    • 77958101205 scopus 로고    scopus 로고
    • Tunable MEMS Spiral Inductors with Optimized RF Performance and Integrated Large-Displacement Electrothermal Actuators
    • SEPTEMBER
    • Jeong-Il Kim, and Dimitrios Peroulis "Tunable MEMS Spiral Inductors with Optimized RF Performance and Integrated Large-Displacement Electrothermal Actuators; IEEE TRANSACTIONS ON MICROWAVE THEORY AND TECHNIQUES, VOL. 57, NO. 9, SEPTEMBER 2009.
    • (2009) IEEE TRANSACTIONS on Microwave Theory and Techniques , vol.57 , Issue.9
    • Kim, J.-I.1    Peroulis, D.2
  • 12
    • 45949102675 scopus 로고    scopus 로고
    • Low-stress fabrication of 3D polymer free standing structures using lamination of photosensitive films
    • Patrick Abgrall Æ Samuel Charlot Æ Remy Fulcrand Æ Lefillastre Paul Æ Ali Boukabache Æ Anne-Marie Gue " Low-stress fabrication of 3D polymer free standing structures using lamination of photosensitive filmsMicrosyst Technol (2008) 14:1205-1214.
    • (2008) Microsyst Technol , vol.14 , pp. 1205-1214
    • Abgrall, P.1    Charlot, S.2    Fulcrand, R.3    Paul, L.4    Boukabache, A.5    Gue, A.-M.6
  • 13


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.