Tunable MEMS spiral inductors with optimized RF performance and integrated large-displacement electrothermal actuators

IEEE Transactions on Microwave Theory and Techniques

Volumn 57, Issue 1, 2009, Pages 2276-2283

  Kim, Jeong Il ^a   Peroulis, Dimitrios ^b  

^a QUALCOMM INC   (United States)

^b PURDUE UNIVERSITY   (United States)

Author keywords

Actuator; Electrothermal; Equivalent circuit; Microelectromechanical systems (MEMS); Tunable inductor

Indexed keywords

COUPLED INDUCTOR; ELECTRO-THERMAL ACTUATORS; ELECTROTHERMAL; EXPECTED VALUES; INDUCTANCE TUNING; INTEGRATED INDUCTORS; MICRO ELECTRO MECHANICAL SYSTEM; MICROELECTROMECHANICAL SYSTEMS; OPTIMAL DESIGN; OPTIMAL PERFORMANCE; QUALITY FACTORS; RELATIVE POSITIONS; RESISTIVE LOSS; RF PERFORMANCE; SPIRAL INDUCTOR; THEORETICAL STUDY; TRANSFORMER CONFIGURATION; TUNABLE INDUCTORS; WIDE FREQUENCY RANGE;

ACTUATORS; BANDPASS FILTERS; ELECTRIC INDUCTORS; ELECTROSTATIC ACTUATORS; INDUCTANCE; MAGNETIC COUPLINGS; MECHATRONICS; MEMS; MICROELECTROMECHANICAL DEVICES; OPTIMIZATION; TUNING;

COMPOSITE MICROMECHANICS;

EID: 77958101205     PISSN: 00189480     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Conference Paper

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