New tunable RF MEMS microinductors design

Journal of Micromechanics and Microengineering

Volumn 14, Issue 9, 2004, Pages

  Charles Marie, Tassetti ^a   Lissorgues, Gaëlle ^a   Gilles, Jean Paul ^b  

^a National Centre of Scientific Research   (France)

^b UNIVERSITÉ PARIS SACLAY   (France)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITORS; ELECTRIC IMPEDANCE; ELECTRIC RESISTANCE; ELECTRIC TRANSFORMERS; ELECTROSTATIC ACTUATORS; ETCHING; FABRICATION; INDUCTANCE; MAGNETIC PERMEABILITY; PERFORMANCE; PHASE SHIFTERS;

MAGNETIC COUPLING; MICROINDUCTORS; RADIO FREQUENCY (RF); WET ETCHING;

MICROELECTROMECHANICAL DEVICES;

EID: 4544284201     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/14/9/003     Document Type: Conference Paper

References (7)

1. Fischer G, Eckl W and Kaminski G 2003 RF-MEMS and SiC/GaN as enabling technologies for a reconfigurable multi-band/multi-standard radio Bell Lab. Tech. J. 7169-89
2. Saleh N 1978 Variable Microelectronic Inductors IEEE Trans. Compon. Hybrids Manuf. Technol. 1 118
3. Zhou S, Sun X Q and Carr W N 1999 A monolithic variable inductor network using microrelays with combined thermal and electrostatic actuation J. Micromech. Microeng. 9 45-50
4. Lubecke V, Barber B, Chan E, Lopez D, Gross M and Gammel P 2001 Self-assembling MEMS variable and fixed RF inductors IEEE Trans. Microw. Theory Tech. 49 2093
5. Tassetti C M, Lissorgues G and Gilles J P 2003 New tunable RF MEMS microinductors design Proc. MME'03 (Nov. 2003)
6. Hung J J, Dussopt L and Rebeiz G M 2003 A low-loss distributed 2-bit W-band MEMS phase shifter EUMW (Munich, 2003)
7. Lee S, Park J H, Kim H T, Kim J M, Kim Y K and Kwon Y 2003 A 15-to 45 GHz low-loss analog reflection-type MEMS phase shifter 2005 IEEE MTT-S International Microwave Symposium Digest